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- W1591233024 abstract "A novel cryogenic capacitive pressure transducer was developed using Silicon micromachining techniques. It employs a flexible Silicon membrane which is sealed to a helium sample chamber with an Indium seal. A thin film capacitor plate is attached to the back side of the membrane. A second thin film capacitor plate is located a short distance away on a fixed Silicon wafer. Pressure variations in the sample cell will flex the membrane thereby adjusting the relative capacitance of the circuit. The membrane can be easily fabricated to precise dimensions, allowing fine tuning of the spacing between the capacitor plates. This allows easy optimization of the sensitivity and dynamic range of the transducer." @default.
- W1591233024 created "2016-06-24" @default.
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- W1591233024 date "1996-01-01" @default.
- W1591233024 modified "2023-10-01" @default.
- W1591233024 title "A Novel Silicon Micromachined Cryogenic Capacitive Pressure Transducer" @default.
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- W1591233024 doi "https://doi.org/10.1007/978-1-4613-0373-2_232" @default.
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