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- W1591345908 abstract "Mo/Si multilayers, were removed from superpolished zerodur and fused silica substrates with a dry etching process that, under suitable processing conditions, produces negligible change in either the substrate surface figure or surface roughness. Full recovery of the initial normal incidence extreme ultra-violet (EUV) reflectance response has been demonstrated on reprocessed substrates." @default.
- W1591345908 created "2016-06-24" @default.
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- W1591345908 date "1995-01-19" @default.
- W1591345908 modified "2023-09-27" @default.
- W1591345908 title "Recovery of EUVL substrates" @default.
- W1591345908 hasPublicationYear "1995" @default.
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