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• W1592364169 abstract "We report on capacitive micromachined ultrasonic transducers (CMUTs) with vented cavities for varying their bandwidth and sensitivity in airborne applications. The devices are simulated using a finite element model which incorporates viscous and thermal fluid losses in the squeeze film and the vent holes, as well as acoustic radiation and acoustic resonance in the backing. Our model accurately predicts the behavior of such CMUTs. The model is also validated with measurements at elevated pressure." @default.
• W1592364169 created "2016-06-24" @default.
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• W1592364169 date "2015-06-01" @default.
• W1592364169 modified "2023-09-23" @default.
• W1592364169 title "Effect of fluid losses and acoustic resonances in CMUTs with vented cavities" @default.
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• W1592364169 doi "https://doi.org/10.1109/transducers.2015.7181015" @default.
• W1592364169 hasPublicationYear "2015" @default.
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