Matches in SemOpenAlex for { <https://semopenalex.org/work/W1592646434> ?p ?o ?g. }
Showing items 1 to 41 of
41
with 100 items per page.
- W1592646434 endingPage "623" @default.
- W1592646434 startingPage "621" @default.
- W1592646434 abstract "SU-8胶的热溶胀效应及其机理进行了研究，在现有微模具的UV-LIGA工艺的基础上，利用AN-SYS对SU-8胶的热溶胀性规律进行了仿真分析。通过SU-8胶模的溶胀实验，建立了热溶胀变形的速率模型，并计算了不同电铸时间下微模具的顶部线宽，计算结果与实验值基本吻合。仿真结果可用来优化掩模图形的设计及预测电铸后微模具的尺寸。" @default.
- W1592646434 created "2016-06-24" @default.
- W1592646434 creator A5001741395 @default.
- W1592646434 creator A5014887949 @default.
- W1592646434 creator A5068341852 @default.
- W1592646434 date "2008-01-01" @default.
- W1592646434 modified "2023-09-24" @default.
- W1592646434 title "UV-LIGA工艺中SU-8光刻胶的热溶胀性研究" @default.
- W1592646434 hasPublicationYear "2008" @default.
- W1592646434 type Work @default.
- W1592646434 sameAs 1592646434 @default.
- W1592646434 citedByCount "0" @default.
- W1592646434 crossrefType "journal-article" @default.
- W1592646434 hasAuthorship W1592646434A5001741395 @default.
- W1592646434 hasAuthorship W1592646434A5014887949 @default.
- W1592646434 hasAuthorship W1592646434A5068341852 @default.
- W1592646434 hasConcept C121332964 @default.
- W1592646434 hasConcept C136525101 @default.
- W1592646434 hasConcept C142724271 @default.
- W1592646434 hasConcept C145695476 @default.
- W1592646434 hasConcept C204787440 @default.
- W1592646434 hasConcept C41008148 @default.
- W1592646434 hasConcept C71924100 @default.
- W1592646434 hasConceptScore W1592646434C121332964 @default.
- W1592646434 hasConceptScore W1592646434C136525101 @default.
- W1592646434 hasConceptScore W1592646434C142724271 @default.
- W1592646434 hasConceptScore W1592646434C145695476 @default.
- W1592646434 hasConceptScore W1592646434C204787440 @default.
- W1592646434 hasConceptScore W1592646434C41008148 @default.
- W1592646434 hasConceptScore W1592646434C71924100 @default.
- W1592646434 hasIssue "5" @default.
- W1592646434 hasLocation W15926464341 @default.
- W1592646434 hasOpenAccess W1592646434 @default.
- W1592646434 hasPrimaryLocation W15926464341 @default.
- W1592646434 hasVolume "30" @default.
- W1592646434 isParatext "false" @default.
- W1592646434 isRetracted "false" @default.
- W1592646434 magId "1592646434" @default.
- W1592646434 workType "article" @default.