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• W1592849982 abstract "High control performance is essential in many precision positioning applications, such as control of the vertical sample position in a atomic-force microscope (AFM). This paper investigates the impact of load flexibility on piezoelectrically actuated positioning systems in terms of control performance. The modeling method used combines modal analysis with simple transfer function manipulations, and shows, how the load dynamics may influence the control performance. The analysis is experimentally verified on a commercial AFM system." @default.
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• W1592849982 date "2009-08-01" @default.
• W1592849982 modified "2023-09-23" @default.
• W1592849982 title "Load dynamics in piezoelectric actuation" @default.
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• W1592849982 doi "https://doi.org/10.23919/ecc.2009.7075194" @default.
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