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- W1592935005 abstract "A novel structure of front end passband bulk acoustic wave (BAW) filter using surface micromachining is designed. The advantage and disadvantage of fabricating BAW RF filter using surface and bulk micromachining are discussed. Porous silicon (PS) is used as a thick sacrificial layer. The process flow for fabricating BAW filters is given." @default.
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- W1592935005 date "2005-08-25" @default.
- W1592935005 modified "2023-09-25" @default.
- W1592935005 title "Study of BAW filter using surface micromachining" @default.
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- W1592935005 doi "https://doi.org/10.1109/icsict.2001.982026" @default.
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