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- W1593002826 abstract "The development, operation, and applications of two configurations of an integrated plasma-aided nanofabrication facility (IPANF) comprising low-frequency inductively coupled plasma-assisted, low-pressure, multiple-target RF magnetron sputtering plasma source, are reported. The two configurations of the plasma source have different arrangements of the RF inductive coil: a conventional external flat spiral pancake coil and an in-house developed internal antenna comprising two orthogonal RF current sheets. The internal antenna configuration generates a unidirectional RF current that deeply penetrates into the plasma bulk and results in an excellent uniformity of the plasma over large areas and volumes. The IPANF has been employed for various applications, including low-temperature plasma-enhanced chemical vapor deposition of vertically aligned single-crystalline carbon nanotips, growth of ultra-high aspect ratio semiconductor nanowires, assembly of optoelectronically important Si, SiC, and Al1-xInxN quantum dots, and plasma-based synthesis of bioactive hydroxyapatite for orthopedic implants." @default.
- W1593002826 created "2016-06-24" @default.
- W1593002826 creator A5030613516 @default.
- W1593002826 creator A5051463344 @default.
- W1593002826 creator A5053030986 @default.
- W1593002826 creator A5091222164 @default.
- W1593002826 date "2006-01-01" @default.
- W1593002826 modified "2023-09-24" @default.
- W1593002826 title "Integrated plasma-aided nanofabrication facility: Operation, parameters, and assembly of quantum structures and functional nanomaterials" @default.
- W1593002826 hasPublicationYear "2006" @default.
- W1593002826 type Work @default.
- W1593002826 sameAs 1593002826 @default.
- W1593002826 citedByCount "0" @default.
- W1593002826 crossrefType "journal-article" @default.
- W1593002826 hasAuthorship W1593002826A5030613516 @default.
- W1593002826 hasAuthorship W1593002826A5051463344 @default.
- W1593002826 hasAuthorship W1593002826A5053030986 @default.
- W1593002826 hasAuthorship W1593002826A5091222164 @default.
- W1593002826 hasConcept C119599485 @default.
- W1593002826 hasConcept C121332964 @default.
- W1593002826 hasConcept C127413603 @default.
- W1593002826 hasConcept C136525101 @default.
- W1593002826 hasConcept C138631740 @default.
- W1593002826 hasConcept C142724271 @default.
- W1593002826 hasConcept C162117346 @default.
- W1593002826 hasConcept C171250308 @default.
- W1593002826 hasConcept C19067145 @default.
- W1593002826 hasConcept C192562407 @default.
- W1593002826 hasConcept C204787440 @default.
- W1593002826 hasConcept C22423302 @default.
- W1593002826 hasConcept C30403606 @default.
- W1593002826 hasConcept C49040817 @default.
- W1593002826 hasConcept C57410435 @default.
- W1593002826 hasConcept C61427134 @default.
- W1593002826 hasConcept C62520636 @default.
- W1593002826 hasConcept C71924100 @default.
- W1593002826 hasConcept C74214498 @default.
- W1593002826 hasConcept C82706917 @default.
- W1593002826 hasConcept C95974651 @default.
- W1593002826 hasConceptScore W1593002826C119599485 @default.
- W1593002826 hasConceptScore W1593002826C121332964 @default.
- W1593002826 hasConceptScore W1593002826C127413603 @default.
- W1593002826 hasConceptScore W1593002826C136525101 @default.
- W1593002826 hasConceptScore W1593002826C138631740 @default.
- W1593002826 hasConceptScore W1593002826C142724271 @default.
- W1593002826 hasConceptScore W1593002826C162117346 @default.
- W1593002826 hasConceptScore W1593002826C171250308 @default.
- W1593002826 hasConceptScore W1593002826C19067145 @default.
- W1593002826 hasConceptScore W1593002826C192562407 @default.
- W1593002826 hasConceptScore W1593002826C204787440 @default.
- W1593002826 hasConceptScore W1593002826C22423302 @default.
- W1593002826 hasConceptScore W1593002826C30403606 @default.
- W1593002826 hasConceptScore W1593002826C49040817 @default.
- W1593002826 hasConceptScore W1593002826C57410435 @default.
- W1593002826 hasConceptScore W1593002826C61427134 @default.
- W1593002826 hasConceptScore W1593002826C62520636 @default.
- W1593002826 hasConceptScore W1593002826C71924100 @default.
- W1593002826 hasConceptScore W1593002826C74214498 @default.
- W1593002826 hasConceptScore W1593002826C82706917 @default.
- W1593002826 hasConceptScore W1593002826C95974651 @default.
- W1593002826 hasLocation W15930028261 @default.
- W1593002826 hasOpenAccess W1593002826 @default.
- W1593002826 hasPrimaryLocation W15930028261 @default.
- W1593002826 hasRelatedWork W1485044707 @default.
- W1593002826 hasRelatedWork W1523572128 @default.
- W1593002826 hasRelatedWork W1552896691 @default.
- W1593002826 hasRelatedWork W1713008771 @default.
- W1593002826 hasRelatedWork W1966389509 @default.
- W1593002826 hasRelatedWork W1977972657 @default.
- W1593002826 hasRelatedWork W1990616876 @default.
- W1593002826 hasRelatedWork W1995997416 @default.
- W1593002826 hasRelatedWork W2048962038 @default.
- W1593002826 hasRelatedWork W2055170364 @default.
- W1593002826 hasRelatedWork W2077005568 @default.
- W1593002826 hasRelatedWork W2152485136 @default.
- W1593002826 hasRelatedWork W2508600334 @default.
- W1593002826 hasRelatedWork W2538090084 @default.
- W1593002826 hasRelatedWork W2613060709 @default.
- W1593002826 hasRelatedWork W2788357046 @default.
- W1593002826 hasRelatedWork W2972476420 @default.
- W1593002826 hasRelatedWork W96159909 @default.
- W1593002826 hasRelatedWork W1543378367 @default.
- W1593002826 hasRelatedWork W2086495731 @default.
- W1593002826 isParatext "false" @default.
- W1593002826 isRetracted "false" @default.
- W1593002826 magId "1593002826" @default.
- W1593002826 workType "article" @default.