Matches in SemOpenAlex for { <https://semopenalex.org/work/W1593036782> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W1593036782 startingPage "28719" @default.
- W1593036782 abstract "Abstract : Any measure of lithographic sensitivity must take into account both the events during exposure (latent image formation) and their subsequent conversion into an etch-resistant stencil (real image formation) by selective dissolution. Poly(methyl methacrylate), a popular positive chain-scissioning resist, is developed by dissolving exposed areas. Poly(chloromethyl styrene), a negative resist, crosslinks on exposure and is developed by dissolving the unexposed polymer. In each case the equations relating primary exposure events to parameters such as molecular weight need to be coupled with the dissolution characteristics to define sensitivity. The reconciliation of lithographic sensitivity (and resolution) with conventional radiation measurements also requires an understanding of important secondary phenomena. Some, like microporosity and gel-swelling, may also depend on the initial molecular weight and molecular weight distribution of the polymer." @default.
- W1593036782 created "2016-06-24" @default.
- W1593036782 creator A5012356372 @default.
- W1593036782 creator A5018250791 @default.
- W1593036782 creator A5033567180 @default.
- W1593036782 creator A5034025330 @default.
- W1593036782 creator A5081801435 @default.
- W1593036782 date "1989-05-12" @default.
- W1593036782 modified "2023-09-26" @default.
- W1593036782 title "Molecular Weight Dependence of E-Beam Resist Sensitivity" @default.
- W1593036782 hasPublicationYear "1989" @default.
- W1593036782 type Work @default.
- W1593036782 sameAs 1593036782 @default.
- W1593036782 citedByCount "0" @default.
- W1593036782 crossrefType "journal-article" @default.
- W1593036782 hasAuthorship W1593036782A5012356372 @default.
- W1593036782 hasAuthorship W1593036782A5018250791 @default.
- W1593036782 hasAuthorship W1593036782A5033567180 @default.
- W1593036782 hasAuthorship W1593036782A5034025330 @default.
- W1593036782 hasAuthorship W1593036782A5081801435 @default.
- W1593036782 hasConcept C115961682 @default.
- W1593036782 hasConcept C127413603 @default.
- W1593036782 hasConcept C134406635 @default.
- W1593036782 hasConcept C154945302 @default.
- W1593036782 hasConcept C15920480 @default.
- W1593036782 hasConcept C159985019 @default.
- W1593036782 hasConcept C171250308 @default.
- W1593036782 hasConcept C178790620 @default.
- W1593036782 hasConcept C185592680 @default.
- W1593036782 hasConcept C188027245 @default.
- W1593036782 hasConcept C192562407 @default.
- W1593036782 hasConcept C204223013 @default.
- W1593036782 hasConcept C205372313 @default.
- W1593036782 hasConcept C21200559 @default.
- W1593036782 hasConcept C24326235 @default.
- W1593036782 hasConcept C2777566558 @default.
- W1593036782 hasConcept C2778540859 @default.
- W1593036782 hasConcept C2779227376 @default.
- W1593036782 hasConcept C41008148 @default.
- W1593036782 hasConcept C42360764 @default.
- W1593036782 hasConcept C49040817 @default.
- W1593036782 hasConcept C521977710 @default.
- W1593036782 hasConcept C53524968 @default.
- W1593036782 hasConcept C88380143 @default.
- W1593036782 hasConceptScore W1593036782C115961682 @default.
- W1593036782 hasConceptScore W1593036782C127413603 @default.
- W1593036782 hasConceptScore W1593036782C134406635 @default.
- W1593036782 hasConceptScore W1593036782C154945302 @default.
- W1593036782 hasConceptScore W1593036782C15920480 @default.
- W1593036782 hasConceptScore W1593036782C159985019 @default.
- W1593036782 hasConceptScore W1593036782C171250308 @default.
- W1593036782 hasConceptScore W1593036782C178790620 @default.
- W1593036782 hasConceptScore W1593036782C185592680 @default.
- W1593036782 hasConceptScore W1593036782C188027245 @default.
- W1593036782 hasConceptScore W1593036782C192562407 @default.
- W1593036782 hasConceptScore W1593036782C204223013 @default.
- W1593036782 hasConceptScore W1593036782C205372313 @default.
- W1593036782 hasConceptScore W1593036782C21200559 @default.
- W1593036782 hasConceptScore W1593036782C24326235 @default.
- W1593036782 hasConceptScore W1593036782C2777566558 @default.
- W1593036782 hasConceptScore W1593036782C2778540859 @default.
- W1593036782 hasConceptScore W1593036782C2779227376 @default.
- W1593036782 hasConceptScore W1593036782C41008148 @default.
- W1593036782 hasConceptScore W1593036782C42360764 @default.
- W1593036782 hasConceptScore W1593036782C49040817 @default.
- W1593036782 hasConceptScore W1593036782C521977710 @default.
- W1593036782 hasConceptScore W1593036782C53524968 @default.
- W1593036782 hasConceptScore W1593036782C88380143 @default.
- W1593036782 hasLocation W15930367821 @default.
- W1593036782 hasOpenAccess W1593036782 @default.
- W1593036782 hasPrimaryLocation W15930367821 @default.
- W1593036782 hasRelatedWork W1598169571 @default.
- W1593036782 hasRelatedWork W1986641238 @default.
- W1593036782 hasRelatedWork W1998929899 @default.
- W1593036782 hasRelatedWork W2001128519 @default.
- W1593036782 hasRelatedWork W2010802604 @default.
- W1593036782 hasRelatedWork W2029629733 @default.
- W1593036782 hasRelatedWork W2031816121 @default.
- W1593036782 hasRelatedWork W2035864323 @default.
- W1593036782 hasRelatedWork W2040222271 @default.
- W1593036782 hasRelatedWork W2057220865 @default.
- W1593036782 hasRelatedWork W2079746400 @default.
- W1593036782 hasRelatedWork W2082388909 @default.
- W1593036782 hasRelatedWork W2092762170 @default.
- W1593036782 hasRelatedWork W2507802179 @default.
- W1593036782 hasRelatedWork W2710521993 @default.
- W1593036782 hasRelatedWork W2899593656 @default.
- W1593036782 hasRelatedWork W3092080436 @default.
- W1593036782 hasRelatedWork W2224123311 @default.
- W1593036782 hasRelatedWork W2283939807 @default.
- W1593036782 hasRelatedWork W2834274529 @default.
- W1593036782 hasVolume "89" @default.
- W1593036782 isParatext "false" @default.
- W1593036782 isRetracted "false" @default.
- W1593036782 magId "1593036782" @default.
- W1593036782 workType "article" @default.