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• W1593537052 abstract "We report the development of micromachined passive and active probe arrays for parallel dip pen nanolithography (DPN). DPN is a soft lithography method that allows direct, mask-less deposition of chemicals onto substrates with sub 100-nm resolution. An active DPN probe with thermal bimetallic actuation has been developed and tested. Lithographic results and an analytical tool for optimizing active probe designs with respect to a number of performance criteria are also demonstrated." @default.
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• W1593537052 date "2003-10-08" @default.
• W1593537052 modified "2023-09-27" @default.
• W1593537052 title "Micromachined arrayed dip pen nanolithography probes for sub-100 nm direct chemistry patterning" @default.
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• W1593537052 doi "https://doi.org/10.1109/memsys.2003.1189673" @default.
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