Matches in SemOpenAlex for { <https://semopenalex.org/work/W1594916958> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W1594916958 endingPage "7084" @default.
- W1594916958 startingPage "7084" @default.
- W1594916958 abstract "The defect inspectability and printability of X-ray masks have been studied. To clarify the issues concerning the present inspection system, we made an X-ray mask programmed with various defects, such as clear and opaque defects, dimension error and positional shift, for typical patterns such as line-and-space (L&S), hole and 2-dimensional patterns. Both the mask pattern and printed pattern on the wafer were specially inspected using the electron-beam inspection system SEM-Spec701 for the case of L&S patterns. In order to estimate the sensitivity required of the next-generation inspection system, we investigated the critical dimension (CD) errors due to mask defects, by comparing the printed patterns of the programmed-defect mask and the dose image profile calculated with the lithographic simulator Toolset, developed at Wisconsin University. Based on these results, we discussed the critical mask defect sizes that result in 10 nm CD error, and found that defects larger than 40 nm would significantly affect 100 nm L&S patterns." @default.
- W1594916958 created "2016-06-24" @default.
- W1594916958 creator A5024719822 @default.
- W1594916958 creator A5028400526 @default.
- W1594916958 creator A5048937697 @default.
- W1594916958 creator A5062845909 @default.
- W1594916958 creator A5063315009 @default.
- W1594916958 creator A5067767778 @default.
- W1594916958 creator A5077497828 @default.
- W1594916958 creator A5088389427 @default.
- W1594916958 date "1999-12-01" @default.
- W1594916958 modified "2023-10-18" @default.
- W1594916958 title "Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask" @default.
- W1594916958 cites W1967879764 @default.
- W1594916958 cites W1973747208 @default.
- W1594916958 cites W1979127398 @default.
- W1594916958 cites W1995011874 @default.
- W1594916958 cites W1996693037 @default.
- W1594916958 cites W2011356188 @default.
- W1594916958 cites W2070061155 @default.
- W1594916958 cites W2072493566 @default.
- W1594916958 cites W2129618391 @default.
- W1594916958 doi "https://doi.org/10.1143/jjap.38.7084" @default.
- W1594916958 hasPublicationYear "1999" @default.
- W1594916958 type Work @default.
- W1594916958 sameAs 1594916958 @default.
- W1594916958 citedByCount "2" @default.
- W1594916958 crossrefType "journal-article" @default.
- W1594916958 hasAuthorship W1594916958A5024719822 @default.
- W1594916958 hasAuthorship W1594916958A5028400526 @default.
- W1594916958 hasAuthorship W1594916958A5048937697 @default.
- W1594916958 hasAuthorship W1594916958A5062845909 @default.
- W1594916958 hasAuthorship W1594916958A5063315009 @default.
- W1594916958 hasAuthorship W1594916958A5067767778 @default.
- W1594916958 hasAuthorship W1594916958A5077497828 @default.
- W1594916958 hasAuthorship W1594916958A5088389427 @default.
- W1594916958 hasConcept C120665830 @default.
- W1594916958 hasConcept C121332964 @default.
- W1594916958 hasConcept C147120987 @default.
- W1594916958 hasConcept C160671074 @default.
- W1594916958 hasConcept C171250308 @default.
- W1594916958 hasConcept C192562407 @default.
- W1594916958 hasConcept C200274948 @default.
- W1594916958 hasConcept C202444582 @default.
- W1594916958 hasConcept C204223013 @default.
- W1594916958 hasConcept C207789793 @default.
- W1594916958 hasConcept C2779227376 @default.
- W1594916958 hasConcept C33676613 @default.
- W1594916958 hasConcept C33923547 @default.
- W1594916958 hasConcept C41008148 @default.
- W1594916958 hasConcept C49040817 @default.
- W1594916958 hasConcept C53524968 @default.
- W1594916958 hasConcept C60056205 @default.
- W1594916958 hasConcept C62520636 @default.
- W1594916958 hasConcept C95312477 @default.
- W1594916958 hasConceptScore W1594916958C120665830 @default.
- W1594916958 hasConceptScore W1594916958C121332964 @default.
- W1594916958 hasConceptScore W1594916958C147120987 @default.
- W1594916958 hasConceptScore W1594916958C160671074 @default.
- W1594916958 hasConceptScore W1594916958C171250308 @default.
- W1594916958 hasConceptScore W1594916958C192562407 @default.
- W1594916958 hasConceptScore W1594916958C200274948 @default.
- W1594916958 hasConceptScore W1594916958C202444582 @default.
- W1594916958 hasConceptScore W1594916958C204223013 @default.
- W1594916958 hasConceptScore W1594916958C207789793 @default.
- W1594916958 hasConceptScore W1594916958C2779227376 @default.
- W1594916958 hasConceptScore W1594916958C33676613 @default.
- W1594916958 hasConceptScore W1594916958C33923547 @default.
- W1594916958 hasConceptScore W1594916958C41008148 @default.
- W1594916958 hasConceptScore W1594916958C49040817 @default.
- W1594916958 hasConceptScore W1594916958C53524968 @default.
- W1594916958 hasConceptScore W1594916958C60056205 @default.
- W1594916958 hasConceptScore W1594916958C62520636 @default.
- W1594916958 hasConceptScore W1594916958C95312477 @default.
- W1594916958 hasIssue "12S" @default.
- W1594916958 hasLocation W15949169581 @default.
- W1594916958 hasOpenAccess W1594916958 @default.
- W1594916958 hasPrimaryLocation W15949169581 @default.
- W1594916958 hasRelatedWork W1594916958 @default.
- W1594916958 hasRelatedWork W1970115220 @default.
- W1594916958 hasRelatedWork W2024382351 @default.
- W1594916958 hasRelatedWork W2040559602 @default.
- W1594916958 hasRelatedWork W2058972705 @default.
- W1594916958 hasRelatedWork W2061442019 @default.
- W1594916958 hasRelatedWork W2062926843 @default.
- W1594916958 hasRelatedWork W2127201763 @default.
- W1594916958 hasRelatedWork W2139131936 @default.
- W1594916958 hasRelatedWork W2904890342 @default.
- W1594916958 hasVolume "38" @default.
- W1594916958 isParatext "false" @default.
- W1594916958 isRetracted "false" @default.
- W1594916958 magId "1594916958" @default.
- W1594916958 workType "article" @default.