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• W1595087302 abstract "Profile control for SU-8 ultrathick photoresist has been examined specifically with respect to a phenomenon observed at the top edge. It has been confirmed that filtering ultraviolet (UV) radiation below 350 nm is successful in correcting this type of geometric defect. The effectiveness of a doped glass filter (Hoya UV-34) has been verified, and an alternative approach using a vapor-deposited thin-film coating has been presented. The thin-film filter demonstrates equal success in reducing the T-topping defect. This alternative approach furthermore offers advantages related to cost, design flexibility, robustness, and environmental impact. Modifying exposure dose and pre-bake temperature without any filter was observed to have minimal impact." @default.
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• W1595087302 date "2004-05-06" @default.
• W1595087302 modified "2023-09-22" @default.
• W1595087302 title "Top-edge profile control for SU-8 structural photoresist" @default.
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• W1595087302 doi "https://doi.org/10.1109/ugim.2003.1225777" @default.
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