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- W1595925898 abstract "The implementation of the BSIM-CMG parameter extraction procedure is presented and discussed, based on measurements. FinFETs with mask channel length from 45nm to 10μm were measured and their DC I-V data used for the extraction. We show an improved fitting of a wide range of channel lengths using a single set of model parameters. Measured devices with fin thickness of 10nm, 15nm and 20nm are studied and the variation of extracted parameters discussed. We propose improvements on the BSIM-CMG extraction procedure to obtain a fitting over a wide range of L <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>eff</sub> . The results present mean absolute percentage errors around 50% and 30%, which shows that a single set of model parameters is inadequate for a wide range of FinFET geometries." @default.
- W1595925898 created "2016-06-24" @default.
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- W1595925898 date "2015-02-01" @default.
- W1595925898 modified "2023-09-29" @default.
- W1595925898 title "Nanoscale FinFET global parameter extraction for the BSIM-CMG model" @default.
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- W1595925898 doi "https://doi.org/10.1109/lascas.2015.7250421" @default.
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