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- W1597799980 abstract "Summary form only given. The two bonding substances investigated were BPSG TEOS and PSG glasses used in semiconductor manufacturing. Both substances can be deposited in an LPCVD furnace on either bare silicon or wafers covered by previously grown thermal oxides. BPSG TEOS (3% phosphorous, 3% boron) softens at 850 degrees C, and usable bonded wafers were achieved by bonding wafers at 950 degrees C, in oxygen or nitrogen, using a ramp-up/ramp-down procedure. PSG, formed by the reduction of POCl/sub 3/ gas, softens at a temperature of 900 degrees C, and usable bonded wafers were achieved by bonding wafers at 950 degrees C using times as short as one hour (no shorter times were tried). Wafers were assembled for bonding within 24 hours of deposition to avoid the creation of circular nonbonded areas caused by outgassing of moisture or dopant in the film. Spin on glass could be used to alleviate the outgassing problem, but in that case the minimum bonding temperature increases to 1100 degrees C. Bond quality was evaluated by destructive wafer separation and physical inspection of the bonded oxide and by grinding back the bonded wafer and assessing the strength of the bond with sonic treatment. Heat stressing was used to determine whether BPSG TEOS could be used to make bonded wafers capable of withstanding the rigors of the standard manufacturing process line. Bond reliability, dopant diffusion, induced bow, and wafer crystal slip were measured on bonded wafers. >" @default.
- W1597799980 created "2016-06-24" @default.
- W1597799980 creator A5001918253 @default.
- W1597799980 creator A5059764639 @default.
- W1597799980 date "2003-01-06" @default.
- W1597799980 modified "2023-09-28" @default.
- W1597799980 title "Wafer bonding using low temperature melting glass" @default.
- W1597799980 doi "https://doi.org/10.1109/soi.1988.95390" @default.
- W1597799980 hasPublicationYear "2003" @default.
- W1597799980 type Work @default.
- W1597799980 sameAs 1597799980 @default.
- W1597799980 citedByCount "1" @default.
- W1597799980 crossrefType "proceedings-article" @default.
- W1597799980 hasAuthorship W1597799980A5001918253 @default.
- W1597799980 hasAuthorship W1597799980A5059764639 @default.
- W1597799980 hasConcept C1012414 @default.
- W1597799980 hasConcept C159096172 @default.
- W1597799980 hasConcept C159985019 @default.
- W1597799980 hasConcept C160671074 @default.
- W1597799980 hasConcept C178790620 @default.
- W1597799980 hasConcept C185592680 @default.
- W1597799980 hasConcept C191897082 @default.
- W1597799980 hasConcept C191952053 @default.
- W1597799980 hasConcept C192562407 @default.
- W1597799980 hasConcept C201414436 @default.
- W1597799980 hasConcept C2779133538 @default.
- W1597799980 hasConcept C2779227376 @default.
- W1597799980 hasConcept C49040817 @default.
- W1597799980 hasConcept C57863236 @default.
- W1597799980 hasConcept C68928338 @default.
- W1597799980 hasConceptScore W1597799980C1012414 @default.
- W1597799980 hasConceptScore W1597799980C159096172 @default.
- W1597799980 hasConceptScore W1597799980C159985019 @default.
- W1597799980 hasConceptScore W1597799980C160671074 @default.
- W1597799980 hasConceptScore W1597799980C178790620 @default.
- W1597799980 hasConceptScore W1597799980C185592680 @default.
- W1597799980 hasConceptScore W1597799980C191897082 @default.
- W1597799980 hasConceptScore W1597799980C191952053 @default.
- W1597799980 hasConceptScore W1597799980C192562407 @default.
- W1597799980 hasConceptScore W1597799980C201414436 @default.
- W1597799980 hasConceptScore W1597799980C2779133538 @default.
- W1597799980 hasConceptScore W1597799980C2779227376 @default.
- W1597799980 hasConceptScore W1597799980C49040817 @default.
- W1597799980 hasConceptScore W1597799980C57863236 @default.
- W1597799980 hasConceptScore W1597799980C68928338 @default.
- W1597799980 hasLocation W15977999801 @default.
- W1597799980 hasOpenAccess W1597799980 @default.
- W1597799980 hasPrimaryLocation W15977999801 @default.
- W1597799980 hasRelatedWork W1964958541 @default.
- W1597799980 hasRelatedWork W1985911234 @default.
- W1597799980 hasRelatedWork W1994196515 @default.
- W1597799980 hasRelatedWork W2008256153 @default.
- W1597799980 hasRelatedWork W2008525880 @default.
- W1597799980 hasRelatedWork W2022782493 @default.
- W1597799980 hasRelatedWork W2032708959 @default.
- W1597799980 hasRelatedWork W2051083017 @default.
- W1597799980 hasRelatedWork W2061185409 @default.
- W1597799980 hasRelatedWork W2062978950 @default.
- W1597799980 hasRelatedWork W2082363608 @default.
- W1597799980 hasRelatedWork W2090713648 @default.
- W1597799980 hasRelatedWork W2106556432 @default.
- W1597799980 hasRelatedWork W2129084498 @default.
- W1597799980 hasRelatedWork W2620942528 @default.
- W1597799980 hasRelatedWork W2752655798 @default.
- W1597799980 hasRelatedWork W3119657507 @default.
- W1597799980 hasRelatedWork W3175758893 @default.
- W1597799980 hasRelatedWork W2159559083 @default.
- W1597799980 hasRelatedWork W2787721420 @default.
- W1597799980 isParatext "false" @default.
- W1597799980 isRetracted "false" @default.
- W1597799980 magId "1597799980" @default.
- W1597799980 workType "article" @default.