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- W1598715350 abstract "A 2.7 nm ALD WN/sub x/C/sub y/ copper barrier was integrated into fully functional backend dual-damascene devices built in SiO/sub 2/ on 200-mm wafers at International Sematech. Electromigration results were extraordinary, with average time to failure more than 10 times longer than standard PVD Ta. Electrical and physical results suggest that ultrathin WN/sub x/C/sub Y/ is an excellent copper barrier and meets the requirements for integration, including: Via resistance, electromigration, barrier integrity, film continuity, etc." @default.
- W1598715350 created "2016-06-24" @default.
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- W1598715350 date "2004-03-22" @default.
- W1598715350 modified "2023-09-23" @default.
- W1598715350 title "The application of ALD WN/sub x/C/sub y/ as a copper diffusion barrier" @default.
- W1598715350 doi "https://doi.org/10.1109/iitc.2003.1219734" @default.
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