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- W1599683985 abstract "Deep and high‐aspect‐ratio micro/nanostructures can be accurately patterned in a variety of resists by proximity lithography using high energy, intense, parallel beams of X‐rays from synchrotron radiation sources. Using so called LIGA technology, high‐aspect‐ratio micro/nanostructures can be produced with vertical dimensions ranging from micrometers to millimeters and horizontal dimensions as small as microns. SSLS has set up its LiMiNT facility (Lithography for Micro/Nanotechnology) and is running it partly as a foundry, partly as a research lab. Under the foundry aspect, work is done for customers in various fields of applications. SSLS’ own research is focusing on the development of devices and artificial composite materials such as electromagnetic metamaterials. In this paper, the technology capabilities of the LiMiNT facility and application examples are presented." @default.
- W1599683985 created "2016-06-24" @default.
- W1599683985 creator A5024367967 @default.
- W1599683985 creator A5038466284 @default.
- W1599683985 creator A5047205826 @default.
- W1599683985 creator A5050571636 @default.
- W1599683985 creator A5053111648 @default.
- W1599683985 creator A5069181164 @default.
- W1599683985 creator A5089223752 @default.
- W1599683985 creator A5091481435 @default.
- W1599683985 date "2007-01-01" @default.
- W1599683985 modified "2023-09-27" @default.
- W1599683985 title "X-ray-based Micro/Nanomanufacturing at SSLS — Technology and Applications" @default.
- W1599683985 doi "https://doi.org/10.1063/1.2436352" @default.
- W1599683985 hasPublicationYear "2007" @default.
- W1599683985 type Work @default.
- W1599683985 sameAs 1599683985 @default.
- W1599683985 citedByCount "3" @default.
- W1599683985 countsByYear W15996839852019 @default.
- W1599683985 crossrefType "proceedings-article" @default.
- W1599683985 hasAuthorship W1599683985A5024367967 @default.
- W1599683985 hasAuthorship W1599683985A5038466284 @default.
- W1599683985 hasAuthorship W1599683985A5047205826 @default.
- W1599683985 hasAuthorship W1599683985A5050571636 @default.
- W1599683985 hasAuthorship W1599683985A5053111648 @default.
- W1599683985 hasAuthorship W1599683985A5069181164 @default.
- W1599683985 hasAuthorship W1599683985A5089223752 @default.
- W1599683985 hasAuthorship W1599683985A5091481435 @default.
- W1599683985 hasConcept C110367647 @default.
- W1599683985 hasConcept C120665830 @default.
- W1599683985 hasConcept C121332964 @default.
- W1599683985 hasConcept C136525101 @default.
- W1599683985 hasConcept C142724271 @default.
- W1599683985 hasConcept C145695476 @default.
- W1599683985 hasConcept C162996421 @default.
- W1599683985 hasConcept C16332341 @default.
- W1599683985 hasConcept C171250308 @default.
- W1599683985 hasConcept C192562407 @default.
- W1599683985 hasConcept C204223013 @default.
- W1599683985 hasConcept C204787440 @default.
- W1599683985 hasConcept C2779227376 @default.
- W1599683985 hasConcept C41794268 @default.
- W1599683985 hasConcept C46312889 @default.
- W1599683985 hasConcept C49040817 @default.
- W1599683985 hasConcept C53524968 @default.
- W1599683985 hasConcept C71924100 @default.
- W1599683985 hasConcept C82558694 @default.
- W1599683985 hasConceptScore W1599683985C110367647 @default.
- W1599683985 hasConceptScore W1599683985C120665830 @default.
- W1599683985 hasConceptScore W1599683985C121332964 @default.
- W1599683985 hasConceptScore W1599683985C136525101 @default.
- W1599683985 hasConceptScore W1599683985C142724271 @default.
- W1599683985 hasConceptScore W1599683985C145695476 @default.
- W1599683985 hasConceptScore W1599683985C162996421 @default.
- W1599683985 hasConceptScore W1599683985C16332341 @default.
- W1599683985 hasConceptScore W1599683985C171250308 @default.
- W1599683985 hasConceptScore W1599683985C192562407 @default.
- W1599683985 hasConceptScore W1599683985C204223013 @default.
- W1599683985 hasConceptScore W1599683985C204787440 @default.
- W1599683985 hasConceptScore W1599683985C2779227376 @default.
- W1599683985 hasConceptScore W1599683985C41794268 @default.
- W1599683985 hasConceptScore W1599683985C46312889 @default.
- W1599683985 hasConceptScore W1599683985C49040817 @default.
- W1599683985 hasConceptScore W1599683985C53524968 @default.
- W1599683985 hasConceptScore W1599683985C71924100 @default.
- W1599683985 hasConceptScore W1599683985C82558694 @default.
- W1599683985 hasLocation W15996839851 @default.
- W1599683985 hasOpenAccess W1599683985 @default.
- W1599683985 hasPrimaryLocation W15996839851 @default.
- W1599683985 hasRelatedWork W1599683985 @default.
- W1599683985 hasRelatedWork W1988383251 @default.
- W1599683985 hasRelatedWork W2037063969 @default.
- W1599683985 hasRelatedWork W2044386508 @default.
- W1599683985 hasRelatedWork W2056894152 @default.
- W1599683985 hasRelatedWork W2083824610 @default.
- W1599683985 hasRelatedWork W2347814675 @default.
- W1599683985 hasRelatedWork W2349948918 @default.
- W1599683985 hasRelatedWork W2490370433 @default.
- W1599683985 hasRelatedWork W3053914760 @default.
- W1599683985 isParatext "false" @default.
- W1599683985 isRetracted "false" @default.
- W1599683985 magId "1599683985" @default.
- W1599683985 workType "article" @default.