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• W1601136421 abstract "We present a technique for direct estimation of the conservative and dissipative nonlinearities of symmetric MEMS resonators. The technique is based on measuring the ring-down response, during which the nonlinearities result in an amplitude-dependent frequency and non-exponential decay. Here we show how analysis of the amplitude and phase of the ring-down response allows one to estimate conservative and dissipative nonlinearities, in addition to the linear natural frequency and quality factor, associated with a vibrational mode. The coefficients obtained from the test allow one to predict the nonlinear open and closed loop responses of the resonator." @default.
• W1601136421 created "2016-06-24" @default.
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• W1601136421 date "2015-06-01" @default.
• W1601136421 modified "2023-09-24" @default.
• W1601136421 title "Characterizing MEMS nonlinearities directly: The ring-down measurements" @default.
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• W1601136421 doi "https://doi.org/10.1109/transducers.2015.7181391" @default.
• W1601136421 hasPublicationYear "2015" @default.
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