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• W1601352928 abstract "Angle-resolved X-ray Photoelectron Spectroscopy (ARXPS) was applied to the TiN/ZrO2/InGaAs stack to assess its thermal stability. Through a robust ARXPS analysis, it was possible to observe subtle effects such as the thermally induced diffusion of substrate atomic species (In and Ga) through the dielectric layer. The detailed characterization of the film structure allowed for assessing the depth profiles of the diffused atomic species by means of the scenarios-method. Since the quantification for the amount of diffused material was done at different temperatures, it was possible to obtain an approximate value of the activation energy for the diffusion of indium through zirconia. The result is very similar to the previously reported values for indium diffusion through alumina and through hafnia." @default.
• W1601352928 created "2016-06-24" @default.
• W1601352928 creator A5001644425 @default.
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• W1601352928 date "2015-06-01" @default.
• W1601352928 modified "2023-10-18" @default.
• W1601352928 title "Indium and gallium diffusion through zirconia in the TiN/ZrO₂/InGaAs stack" @default.
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• W1601352928 doi "https://doi.org/10.1063/1.4921963" @default.
• W1601352928 hasPublicationYear "2015" @default.
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