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- W1601671246 abstract "A modulation transfer function (MTF) calibration method based on binary pseudo-random (BPR) gratings and arrays [Proc. SPIE 7077-7 (2007), Opt. Eng. 47, 073602 (2008)] has been proven to be an effective MTF calibration method for a number of interferometric microscopes and a scatterometer [Nucl. Instr. and Meth. A616, 172 (2010)]. Here we report on a further expansion of the application range of the method. We describe the MTF calibration of a 6 inch phase shifting Fizeau interferometer. Beyond providing a direct measurement of the interferometer's MTF, tests with a BPR array surface have revealed an asymmetry in the instrument's data processing algorithm that fundamentally limits its bandwidth. Moreover, the tests have illustrated the effects of the instrument's detrending and filtering procedures on power spectral density measurements. The details of the development of a BPR test sample suitable for calibration of scanning and transmission electron microscopes are also presented. Such a test sample is realized as a multilayer structure with the layer thicknesses of two materials corresponding to BPR sequence. The investigations confirm the universal character of the method that makes it applicable to a large variety of metrology instrumentation with spatial wavelength bandwidths from a few nanometers to hundreds of millimeters." @default.
- W1601671246 created "2016-06-24" @default.
- W1601671246 creator A5008572903 @default.
- W1601671246 creator A5009017950 @default.
- W1601671246 creator A5020090520 @default.
- W1601671246 creator A5028943728 @default.
- W1601671246 creator A5031072432 @default.
- W1601671246 creator A5035117180 @default.
- W1601671246 creator A5056192611 @default.
- W1601671246 creator A5063878285 @default.
- W1601671246 creator A5070406369 @default.
- W1601671246 date "2011-03-14" @default.
- W1601671246 modified "2023-09-22" @default.
- W1601671246 title "Calibration of the modulation transfer function of surface profilometers with binary pseudo-random test standards: expanding the application range" @default.
- W1601671246 hasPublicationYear "2011" @default.
- W1601671246 type Work @default.
- W1601671246 sameAs 1601671246 @default.
- W1601671246 citedByCount "0" @default.
- W1601671246 crossrefType "journal-article" @default.
- W1601671246 hasAuthorship W1601671246A5008572903 @default.
- W1601671246 hasAuthorship W1601671246A5009017950 @default.
- W1601671246 hasAuthorship W1601671246A5020090520 @default.
- W1601671246 hasAuthorship W1601671246A5028943728 @default.
- W1601671246 hasAuthorship W1601671246A5031072432 @default.
- W1601671246 hasAuthorship W1601671246A5035117180 @default.
- W1601671246 hasAuthorship W1601671246A5056192611 @default.
- W1601671246 hasAuthorship W1601671246A5063878285 @default.
- W1601671246 hasAuthorship W1601671246A5070406369 @default.
- W1601671246 hasConcept C111919701 @default.
- W1601671246 hasConcept C118530786 @default.
- W1601671246 hasConcept C120665830 @default.
- W1601671246 hasConcept C121332964 @default.
- W1601671246 hasConcept C159985019 @default.
- W1601671246 hasConcept C165838908 @default.
- W1601671246 hasConcept C166689943 @default.
- W1601671246 hasConcept C175231954 @default.
- W1601671246 hasConcept C192562407 @default.
- W1601671246 hasConcept C195766429 @default.
- W1601671246 hasConcept C41008148 @default.
- W1601671246 hasConcept C62520636 @default.
- W1601671246 hasConcept C71039073 @default.
- W1601671246 hasConcept C79261456 @default.
- W1601671246 hasConceptScore W1601671246C111919701 @default.
- W1601671246 hasConceptScore W1601671246C118530786 @default.
- W1601671246 hasConceptScore W1601671246C120665830 @default.
- W1601671246 hasConceptScore W1601671246C121332964 @default.
- W1601671246 hasConceptScore W1601671246C159985019 @default.
- W1601671246 hasConceptScore W1601671246C165838908 @default.
- W1601671246 hasConceptScore W1601671246C166689943 @default.
- W1601671246 hasConceptScore W1601671246C175231954 @default.
- W1601671246 hasConceptScore W1601671246C192562407 @default.
- W1601671246 hasConceptScore W1601671246C195766429 @default.
- W1601671246 hasConceptScore W1601671246C41008148 @default.
- W1601671246 hasConceptScore W1601671246C62520636 @default.
- W1601671246 hasConceptScore W1601671246C71039073 @default.
- W1601671246 hasConceptScore W1601671246C79261456 @default.
- W1601671246 hasLocation W16016712461 @default.
- W1601671246 hasOpenAccess W1601671246 @default.
- W1601671246 hasPrimaryLocation W16016712461 @default.
- W1601671246 hasRelatedWork W1598489366 @default.
- W1601671246 hasRelatedWork W2020441009 @default.
- W1601671246 hasRelatedWork W2038653910 @default.
- W1601671246 hasRelatedWork W2040661649 @default.
- W1601671246 hasRelatedWork W2045190022 @default.
- W1601671246 hasRelatedWork W2049782013 @default.
- W1601671246 hasRelatedWork W2063816178 @default.
- W1601671246 hasRelatedWork W2073965222 @default.
- W1601671246 hasRelatedWork W2085874828 @default.
- W1601671246 hasRelatedWork W2091810531 @default.
- W1601671246 hasRelatedWork W2172065064 @default.
- W1601671246 hasRelatedWork W2197904087 @default.
- W1601671246 hasRelatedWork W2223921127 @default.
- W1601671246 hasRelatedWork W2270965269 @default.
- W1601671246 hasRelatedWork W2600507617 @default.
- W1601671246 hasRelatedWork W2696051361 @default.
- W1601671246 hasRelatedWork W2699097397 @default.
- W1601671246 hasRelatedWork W2971582434 @default.
- W1601671246 hasRelatedWork W3191039163 @default.
- W1601671246 hasRelatedWork W1968945499 @default.
- W1601671246 isParatext "false" @default.
- W1601671246 isRetracted "false" @default.
- W1601671246 magId "1601671246" @default.
- W1601671246 workType "article" @default.