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- W1602316160 abstract "This paper proposes a mathematical model that is derived from bilinear par- tial differential equations (BPDs) in order to congure a control system including the external heat equipment (EHE) proposed in Part1. It is widely recognized that the math- ematical model of the heat exchange unit has been reported. The target control system can be congured using the control parameter of the overall heat exchange coefficient (OHEC), which is given using a linear approximation from BPDs to an ordinary dif- ferential equation (ODE). The numerical simulation results are also represented for the optimal control system, and the gradient method is used in this simulation. Ourndings show that this study is suitable for possible practical systems." @default.
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- W1602316160 date "2013-04-01" @default.
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- W1602316160 title "MATHEMATICAL MODEL OF THERMAL REACTION PROCESS FOR EXTERNAL HEATING EQUIPMENT IN THE MANUFACTURE OF SEMICONDUCTORS (PART II)" @default.
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