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- W1603131341 abstract "This paper demonstrates the approach of sorter automatic operations, which is integrated with an all-new mechanism, called dynamic sub-route in a 300 mm fab. Based on the advanced 300 mm fab operation features of allowing multiple lots in one carrier and multiple recipes within a carrier, this approach facilitates the automation of wafer split/merge and carriers exchange operations in fab daily activities. An automated sorter operation system that implements the approach is being developed in a local 300 mm mass production fab as a key component and driver toward the labor saving, miss operation reduction, and fully automated semiconductor manufacturing." @default.
- W1603131341 created "2016-06-24" @default.
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- W1603131341 date "2004-03-01" @default.
- W1603131341 modified "2023-09-24" @default.
- W1603131341 title "Sorter automatic operations in a 300 mm fab" @default.
- W1603131341 doi "https://doi.org/10.1109/smtw.2002.1197388" @default.
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