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- W1603286068 abstract "By combining a Helicon plasma source at a power of 2500 W (13.56 MHz) and an ECR microwave plasma source at a power of 200 W (2.45 GHz) a new hybrid plasma source was developed. The two methods rely on the same physics where the gas power absorption occurs between the ion cyclotron frequency and the electron cyclotron frequency but at two different heating frequencies (13.56 MHz and 3.54 GHz) simultaneously with the presence of 950 G axial magnetic field. Electron temperature was the order of 1 eV in this type of hybrid discharge. The discharge can be used to study a variety of physical phenomena with applications in ion source development and thruster physics." @default.
- W1603286068 created "2016-06-24" @default.
- W1603286068 creator A5069924782 @default.
- W1603286068 date "2015-05-01" @default.
- W1603286068 modified "2023-09-26" @default.
- W1603286068 title "Development of a hybrid Helicon-ECR plasma source" @default.
- W1603286068 doi "https://doi.org/10.1109/plasma.2015.7179846" @default.
- W1603286068 hasPublicationYear "2015" @default.
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