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• W1603798924 abstract "Compared with conventional high-end optical systems, application of freeform optics offers many advantages. Their widespread use, however, is held back by the lack of a suitable measurement method.The NANOMEFOS project aims at realizing a universal freeform measurement machine to fill that void.The principle of operation of this machine requires a novel sensor for surface distance measurement, the development and realization of which is the objective of the work presented in this thesis. The sensor must enable non-contact, absolute distance measurement of surfaces with reflectivities from 3.5% to 99% over 5 mm range, with 1 nm resolution and a 2s measurement uncertainty of 10 nm for surfaces perpendicular to the measurement direction and 35 nm for surfaces with tilts up to 5°. To meet these requirements, a dual-stage design is proposed: a primary measurement system tracks the surface under test by translating its object lens, while the secondary measurement system measures the displacement of this object lens. After an assessment of various measurement principles through comparison of characteristics inherent to their principle of operation and the possibilities for adaptation, the differential confocal measurement has been selected as the primary measurement method. Interferometry is used as secondary measurement method. To allow for correction of tilt dependent error through calibration, a third measurement system has been added, which measures through which part of the aperture the light returns. An analytical model of the differential confocal measurement principle has been derived to enable optimization. To gain experience with differential confocal measurement, a demonstrator has been built, which has resulted in insights and design rules for prototype development. The models show satisfactory agreement with the experimental results generated using the demonstrator, thus building confidence that the models can be applied as design and optimization tools. Various properties that characterize the performance of a differential confocal measurement system have been identified. Their dependence on the design parameters has been studied through simulations based on the models. The results of this study are applied to optimize the sensor for use in NANOMEFOS. An optical system has been designed in which the interferometer and the differential confocal systems are integrated in a compact design. The optical path of the differential confocal system has been folded using prisms and mirrors so that it can be realized within the allotted volume envelope. For the same reason, many components are adapted from commercially available parts or are custom made. An optomechanical and mechatronic design has been made around the optical system. A custom focusing unit has been designed that comprises a guidance mechanism and actuator to enable tracking of the surface. To achieve a low measurement uncertainty, it aims at accurate motion, high bandwidth and low dissipation. The lateral position of the guidance reproduces within 20 nm and from the frequency response, it is expected that a control bandwidth of at least 800 Hz can be realized. Power dissipation depends on the form of the freeform surface and is a few mW for most expected trajectories. Partly custom electronics are used for signal processing, and to drive the laser and the focusing unit. Control strategies for interferometer nulling, focus locking and surface tracking have been developed, implemented and tested. Various tests have been performed on the system to evaluate the performance. Calibrations must be carried out to achieve the required measurement uncertainty. One calibration is based on a new method to measure tilt dependency of distance sensors. The sensor realized has 5 mm measurement range, -2.5 µm to 1.5 µm tracking range, sub-nanometer resolution, and a small-signal bandwidth of 150 kHz. Using the test results, the 2s measurement uncertainty after calibration is estimated to be 4.2 nm for measurement of rotationally symmetric surfaces, 21 nm for measurement of medium freeform surfaces and 34 nm for measurement of heavily freeform surfaces. To test the performance of the machine with the sensor integrated, measurements of a tilted flat have been carried out. In these measurements, a tilted flat serves as a reference freeform with known surface form. The measurements demonstrate the reduction of tilt dependent error using the new calibration method. A tilt robust, single point distance sensor with millimeter range and nanometer uncertainty has been developed, realized and tested. It is installed in the freeform measurement machine for which it has been developed and is currently used for the measurement of optical surfaces." @default.
• W1603798924 created "2016-06-24" @default.
• W1603798924 creator A5072403908 @default.
• W1603798924 date "2009-01-01" @default.
• W1603798924 modified "2023-09-23" @default.
• W1603798924 title "An optical distance sensor : tilt robust differential confocal measurement with mm range and nm uncertainty" @default.
• W1603798924 doi "https://doi.org/10.6100/ir653288" @default.
• W1603798924 hasPublicationYear "2009" @default.
• W1603798924 type Work @default.
• W1603798924 sameAs 1603798924 @default.
• W1603798924 citedByCount "3" @default.
• W1603798924 crossrefType "journal-article" @default.
• W1603798924 hasAuthorship W1603798924A5072403908 @default.
• W1603798924 hasConcept C105795698 @default.
• W1603798924 hasConcept C120665830 @default.
• W1603798924 hasConcept C121332964 @default.
• W1603798924 hasConcept C1276947 @default.
• W1603798924 hasConcept C136009344 @default.
• W1603798924 hasConcept C137209882 @default.
• W1603798924 hasConcept C15336307 @default.
• W1603798924 hasConcept C165838908 @default.
• W1603798924 hasConcept C19619285 @default.
• W1603798924 hasConcept C20860254 @default.
• W1603798924 hasConcept C33923547 @default.
• W1603798924 hasConcept C37649242 @default.
• W1603798924 hasConcept C41008148 @default.
• W1603798924 hasConcept C62520636 @default.
• W1603798924 hasConcept C71928083 @default.
• W1603798924 hasConceptScore W1603798924C105795698 @default.
• W1603798924 hasConceptScore W1603798924C120665830 @default.
• W1603798924 hasConceptScore W1603798924C121332964 @default.
• W1603798924 hasConceptScore W1603798924C1276947 @default.
• W1603798924 hasConceptScore W1603798924C136009344 @default.
• W1603798924 hasConceptScore W1603798924C137209882 @default.
• W1603798924 hasConceptScore W1603798924C15336307 @default.
• W1603798924 hasConceptScore W1603798924C165838908 @default.
• W1603798924 hasConceptScore W1603798924C19619285 @default.
• W1603798924 hasConceptScore W1603798924C20860254 @default.
• W1603798924 hasConceptScore W1603798924C33923547 @default.
• W1603798924 hasConceptScore W1603798924C37649242 @default.
• W1603798924 hasConceptScore W1603798924C41008148 @default.
• W1603798924 hasConceptScore W1603798924C62520636 @default.
• W1603798924 hasConceptScore W1603798924C71928083 @default.
• W1603798924 hasLocation W16037989241 @default.
• W1603798924 hasOpenAccess W1603798924 @default.
• W1603798924 hasPrimaryLocation W16037989241 @default.
• W1603798924 hasRelatedWork W132463457 @default.
• W1603798924 hasRelatedWork W1963760699 @default.
• W1603798924 hasRelatedWork W2007859399 @default.
• W1603798924 hasRelatedWork W2042513696 @default.
• W1603798924 hasRelatedWork W2076699855 @default.
• W1603798924 hasRelatedWork W2329041901 @default.
• W1603798924 hasRelatedWork W2338054956 @default.
• W1603798924 hasRelatedWork W2494168856 @default.
• W1603798924 hasRelatedWork W2765889765 @default.
• W1603798924 hasRelatedWork W2801828785 @default.
• W1603798924 hasRelatedWork W2973286989 @default.
• W1603798924 hasRelatedWork W3007958791 @default.
• W1603798924 hasRelatedWork W3041339819 @default.
• W1603798924 hasRelatedWork W3127250606 @default.
• W1603798924 hasRelatedWork W3148140805 @default.
• W1603798924 hasRelatedWork W3207838413 @default.
• W1603798924 hasRelatedWork W998965811 @default.
• W1603798924 hasRelatedWork W2133615238 @default.
• W1603798924 hasRelatedWork W2870820430 @default.
• W1603798924 hasRelatedWork W3179263603 @default.
• W1603798924 isParatext "false" @default.
• W1603798924 isRetracted "false" @default.
• W1603798924 magId "1603798924" @default.
• W1603798924 workType "article" @default.