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• W1604081040 abstract "Surface topography measurement plays an important role in many applications in engineering and science. The three dimensional (3D) shapes of objects need to be measured accurately to ensure manufacturing quality. Optical methods have been used as metrological tools for a long time. They are non-contacting, non-destructive and highly accurate. In combination with computers and other electronic devices, they have become faster, more reliable, more convenient and more robust. Among these optical methods, interferometry has received much interest for its shape measurement of optical and nonoptical surfaces. Information about the surface under test can be obtained from interference fringes which characterize the surface. Two-beam interference fringes have been used to investigate the shape of optical and non-optical surfaces for a long time (Born et al., 1980). Phase distribution is encoded in an intensity distribution as a result of interference phenomena, and is displayed in the form of an interference pattern. Phase distribution should therefore be retrievable from the interference pattern. There are many methods of phase evaluation. In this chapter, we present recent developments in interferometry techniques carried out in our laboratory. In Sec. 2, the flat fielding method for coherent noise suppression is described. In Sec. 3, a combination of flat fielding and apodized apertures is presented. In Sec. 4, the phase retrieval using single-shot off-axis geometry, Zernike’s polynomial fitting, Bunnagel’s method, phase shifting interferometry, and two-wavelength interferometry are described. Section 5 describes a new off-axis interferometry configuration and the principle of single-shot, dual-wavelength interferometry for measuring a step height of 1.34 m  nominally. In Sec. 6, a multiple-beam interferometry technique at reflection for measuring the microtopography of an optical flat nominally of /20  is described. Section 7 gives concluding discussions and remarks." @default.
• W1604081040 created "2016-06-24" @default.
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• W1604081040 date "2012-03-21" @default.
• W1604081040 modified "2023-09-28" @default.
• W1604081040 title "Surface Micro Topography Measurement Using Interferometry" @default.
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• W1604081040 doi "https://doi.org/10.5772/35440" @default.
• W1604081040 hasPublicationYear "2012" @default.
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