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- W1605738328 abstract "A closed-loop accelerometer based on electrostatic pull-in time is presented here. The main goal is to achieve high-performance, namely in respect to noise and sensitivity, with a very simple readout mechanism. An integrated system was implemented comprising actuation and readout circuitry, FPGA and MEMS sensor. It presents a good performance in comparison to the state-of-the-art. Experimental measurements have shown a sensitivity of 61.3 V2/g, dynamic range of 110 dB and a noise level set below 3 µg/√Hz, by the mechanical-thermal noise only. The measured bias stability is better than ±250µg over 48h with temperature control of ±1°C." @default.
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- W1605738328 date "2015-06-01" @default.
- W1605738328 modified "2023-09-24" @default.
- W1605738328 title "High-performance pull-in time accelerometer" @default.
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- W1605738328 doi "https://doi.org/10.1109/transducers.2015.7181121" @default.
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