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- W1605888412 abstract "We demonstrate a SiN gate dielectric with oxygen-enriched interface (OI-SiN). A process in which oxygen atoms are incorporated after forming SiN provides enhanced nitrogen concentration and oxygen-enriched interface simultaneously even in the region of EOT < 1.5 nm. Thus we developed an OI-SiN gate dielectric with EOT of 0.9 nm that brought about low gate leakage current, good interface properties and excellent resistance to boron penetration." @default.
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- W1605888412 date "2003-06-25" @default.
- W1605888412 modified "2023-09-23" @default.
- W1605888412 title "An ultra-thin silicon nitride gate dielectric with oxygen-enriched interface (OI-SiN) for CMOS with EOT of 0.9 nm and beyond" @default.
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- W1605888412 doi "https://doi.org/10.1109/vlsit.2002.1015453" @default.
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