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• W1605997548 abstract "This chapter contains sections titled: Introduction Hygroscopic Phenomenon of La2O3 Films Low Permittivity Phenomenon of La2O3 Films Hygroscopic Tolerance Enhancement of La2O3 Films Hygroscopic Tolerance Enhancement of La2O3 Films by Ultraviolet Ozone Treatment Thermodynamic Analysis of Moisture Absorption Phenomenon in High-k Gate Dielectrics Permittivity Enhancement of La2O3 Films by Phase Control Summary References" @default.
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• W1605997548 date "2012-08-22" @default.
• W1605997548 modified "2023-10-16" @default.
• W1605997548 title "Hygroscopic Tolerance and Permittivity Enhancement of Lanthanum Oxide (La₂O₃) for High‐<i>k</i>Gate Insulators" @default.
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• W1605997548 doi "https://doi.org/10.1002/9783527646340.ch6" @default.
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