Matches in SemOpenAlex for { <https://semopenalex.org/work/W1606130> ?p ?o ?g. }
- W1606130 endingPage "165" @default.
- W1606130 startingPage "125" @default.
- W1606130 abstract "The bombardment of solids by ions or energetic neutrals gives rise to a variety of phenomena widely utilized for the modification of surfaces and the deposition of thin films with tailored properties [5.1]. Depending on ion energies and fluxes, ion beams induce etching, sputtering, implantation, and thin film growth. These effects are schematically shown in Fig.5.1." @default.
- W1606130 created "2016-06-24" @default.
- W1606130 creator A5022843091 @default.
- W1606130 creator A5084978033 @default.
- W1606130 date "1999-01-01" @default.
- W1606130 modified "2023-09-27" @default.
- W1606130 title "Thin Film Deposition and Surface Modification by Cluster Beams" @default.
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