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- W1607839411 abstract "We investigate the amorphous thin-film growth of SiO2 and Nb2O5 on glass substrates and quantify the roughness of the film surface by means of a statistical data analysis of atomic force microscopy images. We determine the absolute root-mean-square roughness, the effective growth exponent β, the local roughness exponent α, and the evolution of the lateral correlation length ξa for dual magnetron sputter-deposited thin films." @default.
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- W1607839411 date "2005-11-15" @default.
- W1607839411 modified "2023-10-01" @default.
- W1607839411 title "Roughness evolution in thin-film growth of SiO2 and Nb2O5" @default.
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- W1607839411 doi "https://doi.org/10.1063/1.2130521" @default.
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