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• W1607958354 abstract "This chapter presents a hybrid instrument, which consists of a fast tool servo and a piezoelectric force sensor. It presents a design strategy for integration of the force sensor into the fast tool servo so that the instrument can have a high sensitivity for in-process force detection as well as a high stiffness and bandwidth for cutting of micro structures. The chapter describes in-processing force measurement by using the hybrid instrument and employs in-process force data to estimate the tool wear. It also presents a new technique for on-machine surface profile measurement by using the hybrid instrument as a force controlled stylus probing instrument." @default.
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• W1607958354 date "2013-08-09" @default.
• W1607958354 modified "2023-10-14" @default.
• W1607958354 title "In-Process Micro/Nano Measurement for Micro Cutting" @default.
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• W1607958354 doi "https://doi.org/10.1002/9781118536605.ch11" @default.
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