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• W1608121209 abstract "In this paper new and superior characteristics of an atomic layer deposited (ALD) SiN layer and SiN/SiO/sub 2//SiN multi layers as gate dielectric for flash memory application are reported. Field-sensitive characteristics compared to SiO/sub 2/ were obtained by barrier profile engineering with a SiN/SiO/sub 2//SiN stack; a lower leakage current at a low field and a higher leakage current at a high field. The stacked dielectric layer showed F-N tunneling. However, the interfacial potential barrier profile was somewhat smoothed by chemical interaction between the individual layers. The interfacial trap density of this dielectric with an ALD SiN bottom layer was as low as 4/spl times/10/sup -10//cm/sup 2/eV near the mid-gap energy state, but the re-oxidation process degraded the interface quality. The degradation mechanism was studied using electrical analysis, XPS, and TEM." @default.
• W1608121209 created "2016-06-24" @default.
• W1608121209 creator A5008036043 @default.
• W1608121209 creator A5027075775 @default.
• W1608121209 creator A5027198193 @default.
• W1608121209 creator A5029403253 @default.
• W1608121209 creator A5070434251 @default.
• W1608121209 creator A5082971950 @default.
• W1608121209 date "2005-12-13" @default.
• W1608121209 modified "2023-09-24" @default.
• W1608121209 title "Improvement of the current-voltage characteristics of a tunneling dielectric by barrier engineering by adopting an atomic-layer-deposited sin layer for flash memory applications" @default.
• W1608121209 cites W2038147825 @default.
• W1608121209 cites W2052231590 @default.
• W1608121209 doi "https://doi.org/10.1109/essder.2005.1546698" @default.
• W1608121209 hasPublicationYear "2005" @default.
• W1608121209 type Work @default.
• W1608121209 sameAs 1608121209 @default.
• W1608121209 citedByCount "2" @default.
• W1608121209 countsByYear W16081212092013 @default.
• W1608121209 crossrefType "proceedings-article" @default.
• W1608121209 hasAuthorship W1608121209A5008036043 @default.
• W1608121209 hasAuthorship W1608121209A5027075775 @default.
• W1608121209 hasAuthorship W1608121209A5027198193 @default.
• W1608121209 hasAuthorship W1608121209A5029403253 @default.
• W1608121209 hasAuthorship W1608121209A5070434251 @default.
• W1608121209 hasAuthorship W1608121209A5082971950 @default.
• W1608121209 hasConcept C111919701 @default.
• W1608121209 hasConcept C113196181 @default.
• W1608121209 hasConcept C119599485 @default.
• W1608121209 hasConcept C120398109 @default.
• W1608121209 hasConcept C121332964 @default.
• W1608121209 hasConcept C127413603 @default.
• W1608121209 hasConcept C133386390 @default.
• W1608121209 hasConcept C139719470 @default.
• W1608121209 hasConcept C162324750 @default.
• W1608121209 hasConcept C16317505 @default.
• W1608121209 hasConcept C165801399 @default.
• W1608121209 hasConcept C166972891 @default.
• W1608121209 hasConcept C171250308 @default.
• W1608121209 hasConcept C172385210 @default.
• W1608121209 hasConcept C175708663 @default.
• W1608121209 hasConcept C185592680 @default.
• W1608121209 hasConcept C192562407 @default.
• W1608121209 hasConcept C199360897 @default.
• W1608121209 hasConcept C2776531357 @default.
• W1608121209 hasConcept C2777042071 @default.
• W1608121209 hasConcept C2779227376 @default.
• W1608121209 hasConcept C2779833192 @default.
• W1608121209 hasConcept C41008148 @default.
• W1608121209 hasConcept C43617362 @default.
• W1608121209 hasConcept C46141821 @default.
• W1608121209 hasConcept C49040817 @default.
• W1608121209 hasConcept C69544855 @default.
• W1608121209 hasConcept C9395851 @default.
• W1608121209 hasConceptScore W1608121209C111919701 @default.
• W1608121209 hasConceptScore W1608121209C113196181 @default.
• W1608121209 hasConceptScore W1608121209C119599485 @default.
• W1608121209 hasConceptScore W1608121209C120398109 @default.
• W1608121209 hasConceptScore W1608121209C121332964 @default.
• W1608121209 hasConceptScore W1608121209C127413603 @default.
• W1608121209 hasConceptScore W1608121209C133386390 @default.
• W1608121209 hasConceptScore W1608121209C139719470 @default.
• W1608121209 hasConceptScore W1608121209C162324750 @default.
• W1608121209 hasConceptScore W1608121209C16317505 @default.
• W1608121209 hasConceptScore W1608121209C165801399 @default.
• W1608121209 hasConceptScore W1608121209C166972891 @default.
• W1608121209 hasConceptScore W1608121209C171250308 @default.
• W1608121209 hasConceptScore W1608121209C172385210 @default.
• W1608121209 hasConceptScore W1608121209C175708663 @default.
• W1608121209 hasConceptScore W1608121209C185592680 @default.
• W1608121209 hasConceptScore W1608121209C192562407 @default.
• W1608121209 hasConceptScore W1608121209C199360897 @default.
• W1608121209 hasConceptScore W1608121209C2776531357 @default.
• W1608121209 hasConceptScore W1608121209C2777042071 @default.
• W1608121209 hasConceptScore W1608121209C2779227376 @default.
• W1608121209 hasConceptScore W1608121209C2779833192 @default.
• W1608121209 hasConceptScore W1608121209C41008148 @default.
• W1608121209 hasConceptScore W1608121209C43617362 @default.
• W1608121209 hasConceptScore W1608121209C46141821 @default.
• W1608121209 hasConceptScore W1608121209C49040817 @default.
• W1608121209 hasConceptScore W1608121209C69544855 @default.
• W1608121209 hasConceptScore W1608121209C9395851 @default.
• W1608121209 hasLocation W16081212091 @default.
• W1608121209 hasOpenAccess W1608121209 @default.
• W1608121209 hasPrimaryLocation W16081212091 @default.
• W1608121209 hasRelatedWork W1676809209 @default.
• W1608121209 hasRelatedWork W2022464704 @default.
• W1608121209 hasRelatedWork W2054687356 @default.
• W1608121209 hasRelatedWork W2056861622 @default.
• W1608121209 hasRelatedWork W2058184765 @default.
• W1608121209 hasRelatedWork W2060038069 @default.
• W1608121209 hasRelatedWork W2063566322 @default.
• W1608121209 hasRelatedWork W2066424959 @default.
• W1608121209 hasRelatedWork W2075543070 @default.
• W1608121209 hasRelatedWork W2075807111 @default.
• W1608121209 hasRelatedWork W2137565708 @default.
• W1608121209 hasRelatedWork W2167576953 @default.
• W1608121209 hasRelatedWork W218031126 @default.
• W1608121209 hasRelatedWork W2208759677 @default.
• W1608121209 hasRelatedWork W2532866824 @default.

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