Matches in SemOpenAlex for { <https://semopenalex.org/work/W1608282958> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1608282958 abstract "Process control in semiconductor manufacturing has sought to improve yield, increase tool productivity and reduce manufacturing costs through the analysis of tool sensor outputs. Statistical process control (SPC) utilizes statistical algorithms to detect excursion events, but here a novel fault detection and classification (FDC) approach based upon a pattern recognition algorithm is presented. This FDC method from Straatum/spl trade/ is real-time, outputting a chamber status metric known as the plasma index. The system is in place at ProMOS Technologies Inc, 200 mm manufacturing facility on various semiconductor tools - this document presents its implementation on a number of Tokyo/spl trade/ DRM/spl trade/ oxide etch tools and includes a number of case studies." @default.
- W1608282958 created "2016-06-24" @default.
- W1608282958 creator A5018201820 @default.
- W1608282958 creator A5037600561 @default.
- W1608282958 creator A5045978350 @default.
- W1608282958 date "2005-03-21" @default.
- W1608282958 modified "2023-09-24" @default.
- W1608282958 title "Real-time fault detection and classification for manufacturing etch tools" @default.
- W1608282958 cites W1968224762 @default.
- W1608282958 cites W2074634066 @default.
- W1608282958 doi "https://doi.org/10.1109/smtw.2004.1393736" @default.
- W1608282958 hasPublicationYear "2005" @default.
- W1608282958 type Work @default.
- W1608282958 sameAs 1608282958 @default.
- W1608282958 citedByCount "4" @default.
- W1608282958 countsByYear W16082829582014 @default.
- W1608282958 crossrefType "proceedings-article" @default.
- W1608282958 hasAuthorship W1608282958A5018201820 @default.
- W1608282958 hasAuthorship W1608282958A5037600561 @default.
- W1608282958 hasAuthorship W1608282958A5045978350 @default.
- W1608282958 hasConcept C111919701 @default.
- W1608282958 hasConcept C113644684 @default.
- W1608282958 hasConcept C117671659 @default.
- W1608282958 hasConcept C119599485 @default.
- W1608282958 hasConcept C127413603 @default.
- W1608282958 hasConcept C152745839 @default.
- W1608282958 hasConcept C154945302 @default.
- W1608282958 hasConcept C159985019 @default.
- W1608282958 hasConcept C160671074 @default.
- W1608282958 hasConcept C172707124 @default.
- W1608282958 hasConcept C176217482 @default.
- W1608282958 hasConcept C192562407 @default.
- W1608282958 hasConcept C200601418 @default.
- W1608282958 hasConcept C21547014 @default.
- W1608282958 hasConcept C2987875673 @default.
- W1608282958 hasConcept C41008148 @default.
- W1608282958 hasConcept C66018809 @default.
- W1608282958 hasConcept C79403827 @default.
- W1608282958 hasConcept C98045186 @default.
- W1608282958 hasConceptScore W1608282958C111919701 @default.
- W1608282958 hasConceptScore W1608282958C113644684 @default.
- W1608282958 hasConceptScore W1608282958C117671659 @default.
- W1608282958 hasConceptScore W1608282958C119599485 @default.
- W1608282958 hasConceptScore W1608282958C127413603 @default.
- W1608282958 hasConceptScore W1608282958C152745839 @default.
- W1608282958 hasConceptScore W1608282958C154945302 @default.
- W1608282958 hasConceptScore W1608282958C159985019 @default.
- W1608282958 hasConceptScore W1608282958C160671074 @default.
- W1608282958 hasConceptScore W1608282958C172707124 @default.
- W1608282958 hasConceptScore W1608282958C176217482 @default.
- W1608282958 hasConceptScore W1608282958C192562407 @default.
- W1608282958 hasConceptScore W1608282958C200601418 @default.
- W1608282958 hasConceptScore W1608282958C21547014 @default.
- W1608282958 hasConceptScore W1608282958C2987875673 @default.
- W1608282958 hasConceptScore W1608282958C41008148 @default.
- W1608282958 hasConceptScore W1608282958C66018809 @default.
- W1608282958 hasConceptScore W1608282958C79403827 @default.
- W1608282958 hasConceptScore W1608282958C98045186 @default.
- W1608282958 hasLocation W16082829581 @default.
- W1608282958 hasOpenAccess W1608282958 @default.
- W1608282958 hasPrimaryLocation W16082829581 @default.
- W1608282958 hasRelatedWork W1482164496 @default.
- W1608282958 hasRelatedWork W1536569398 @default.
- W1608282958 hasRelatedWork W1596531975 @default.
- W1608282958 hasRelatedWork W1875368979 @default.
- W1608282958 hasRelatedWork W1886498162 @default.
- W1608282958 hasRelatedWork W2045847920 @default.
- W1608282958 hasRelatedWork W2066567429 @default.
- W1608282958 hasRelatedWork W2066584761 @default.
- W1608282958 hasRelatedWork W2120951552 @default.
- W1608282958 hasRelatedWork W2129353522 @default.
- W1608282958 hasRelatedWork W2132891913 @default.
- W1608282958 hasRelatedWork W2136681626 @default.
- W1608282958 hasRelatedWork W2146435486 @default.
- W1608282958 hasRelatedWork W2158486846 @default.
- W1608282958 hasRelatedWork W2172117203 @default.
- W1608282958 hasRelatedWork W3139686559 @default.
- W1608282958 hasRelatedWork W2823289015 @default.
- W1608282958 hasRelatedWork W2874885929 @default.
- W1608282958 hasRelatedWork W2935235835 @default.
- W1608282958 hasRelatedWork W3141028266 @default.
- W1608282958 isParatext "false" @default.
- W1608282958 isRetracted "false" @default.
- W1608282958 magId "1608282958" @default.
- W1608282958 workType "article" @default.