Matches in SemOpenAlex for { <https://semopenalex.org/work/W1608778752> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W1608778752 endingPage "2329" @default.
- W1608778752 startingPage "2323" @default.
- W1608778752 abstract "The growth, thermal annealing behaviors, and electrical properties of Al2O3 thin films grown by atomic layer deposition (ALD) on bare (100)Si and various oxidized Si wafers, by in situ O3 oxidation at 400°C and ex situ rapid thermal annealing (RTA) under O2 atmosphere at 900°C, were investigated. The ALD process was performed using Al(CH3)3 and high concentration of O3(400gm3). The high oxidation potential of O3 oxidized the Si surface at a very early stage of film growth and eliminated the incubation period even on a bare Si surface. The as-grown Al2O3 films had excess oxygen in the films, which diffused to the film Si interface and increased the interfacial layer by oxidizing the Si substrates during postannealing. The Al2O3 films grown on a bare Si substrate had the highest concentration of excess oxygen which resulted in the largest increase in the interfacial layer thickness during postannealing. As a result, the initial oxidation of the Si wafer did not significantly decrease the capacitance density..." @default.
- W1608778752 created "2016-06-24" @default.
- W1608778752 creator A5027075775 @default.
- W1608778752 creator A5061558684 @default.
- W1608778752 date "2004-08-15" @default.
- W1608778752 modified "2023-10-03" @default.
- W1608778752 title "Atomic-layer-deposited Al2O3 thin films with thin SiO2 layers grown by <i>in situ</i> O3 oxidation" @default.
- W1608778752 cites W103493881 @default.
- W1608778752 cites W1543323420 @default.
- W1608778752 cites W1963550018 @default.
- W1608778752 cites W1977598035 @default.
- W1608778752 cites W1996003259 @default.
- W1608778752 cites W2009094472 @default.
- W1608778752 cites W2029925702 @default.
- W1608778752 cites W2035285737 @default.
- W1608778752 cites W2038330453 @default.
- W1608778752 cites W2087532750 @default.
- W1608778752 cites W2091417196 @default.
- W1608778752 cites W2094051278 @default.
- W1608778752 cites W2108996436 @default.
- W1608778752 cites W2147131024 @default.
- W1608778752 cites W2164859981 @default.
- W1608778752 doi "https://doi.org/10.1063/1.1769090" @default.
- W1608778752 hasPublicationYear "2004" @default.
- W1608778752 type Work @default.
- W1608778752 sameAs 1608778752 @default.
- W1608778752 citedByCount "68" @default.
- W1608778752 countsByYear W16087787522012 @default.
- W1608778752 countsByYear W16087787522013 @default.
- W1608778752 countsByYear W16087787522014 @default.
- W1608778752 countsByYear W16087787522015 @default.
- W1608778752 countsByYear W16087787522016 @default.
- W1608778752 countsByYear W16087787522017 @default.
- W1608778752 countsByYear W16087787522018 @default.
- W1608778752 countsByYear W16087787522019 @default.
- W1608778752 countsByYear W16087787522021 @default.
- W1608778752 countsByYear W16087787522022 @default.
- W1608778752 crossrefType "journal-article" @default.
- W1608778752 hasAuthorship W1608778752A5027075775 @default.
- W1608778752 hasAuthorship W1608778752A5061558684 @default.
- W1608778752 hasConcept C127413603 @default.
- W1608778752 hasConcept C171250308 @default.
- W1608778752 hasConcept C178790620 @default.
- W1608778752 hasConcept C185592680 @default.
- W1608778752 hasConcept C19067145 @default.
- W1608778752 hasConcept C192562407 @default.
- W1608778752 hasConcept C2777822432 @default.
- W1608778752 hasConcept C2779227376 @default.
- W1608778752 hasConcept C42360764 @default.
- W1608778752 hasConcept C62960913 @default.
- W1608778752 hasConcept C69544855 @default.
- W1608778752 hasConceptScore W1608778752C127413603 @default.
- W1608778752 hasConceptScore W1608778752C171250308 @default.
- W1608778752 hasConceptScore W1608778752C178790620 @default.
- W1608778752 hasConceptScore W1608778752C185592680 @default.
- W1608778752 hasConceptScore W1608778752C19067145 @default.
- W1608778752 hasConceptScore W1608778752C192562407 @default.
- W1608778752 hasConceptScore W1608778752C2777822432 @default.
- W1608778752 hasConceptScore W1608778752C2779227376 @default.
- W1608778752 hasConceptScore W1608778752C42360764 @default.
- W1608778752 hasConceptScore W1608778752C62960913 @default.
- W1608778752 hasConceptScore W1608778752C69544855 @default.
- W1608778752 hasIssue "4" @default.
- W1608778752 hasLocation W16087787521 @default.
- W1608778752 hasOpenAccess W1608778752 @default.
- W1608778752 hasPrimaryLocation W16087787521 @default.
- W1608778752 hasRelatedWork W1608778752 @default.
- W1608778752 hasRelatedWork W2031161559 @default.
- W1608778752 hasRelatedWork W2051061608 @default.
- W1608778752 hasRelatedWork W2089042530 @default.
- W1608778752 hasRelatedWork W2148774089 @default.
- W1608778752 hasRelatedWork W2316338516 @default.
- W1608778752 hasRelatedWork W2507670790 @default.
- W1608778752 hasRelatedWork W2905841779 @default.
- W1608778752 hasRelatedWork W3109681559 @default.
- W1608778752 hasRelatedWork W3175146547 @default.
- W1608778752 hasVolume "96" @default.
- W1608778752 isParatext "false" @default.
- W1608778752 isRetracted "false" @default.
- W1608778752 magId "1608778752" @default.
- W1608778752 workType "article" @default.