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- W1610521166 abstract "This paper describes the fabrication process and mechanical properties of a novel probe card were described. To match the thermal expansion between the probe card and a silicon wafer in wafer-level burn-in test, a Pyrex glass substrate with feedthrough connections was used to support the probes. To make the slantwise probe contactors, spray coating was used to form a uniform photoresist film on a deeply-wet-etched silicon wafer. The fabricated probe card has 13185 p/sup +/ silicon probe contactors at a pitch of 150 /spl mu/m on an area of 44.0 mm /spl times/ 45.7 mm. The rigidity of the probes is approximately 91.45 N/m. The planarity of the probe tips is within /spl plusmn/ 1 /spl mu/m from the base level." @default.
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- W1610521166 date "2005-08-24" @default.
- W1610521166 modified "2023-09-24" @default.
- W1610521166 title "A matched expansion probe card for high temperature LSI testing" @default.
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- W1610521166 doi "https://doi.org/10.1109/sensor.2005.1497308" @default.
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