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- W1610939064 abstract "This work clarifies roles of substrate-Si in SiO 2 -IL scavenging in HfO 2 /SiO 2 /Si gate stack experimentally, and points out a coupling effect of oxygen vacancy (V O ) with SiO 2 /Si interface from thermodynamic viewpoint." @default.
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- W1610939064 date "2015-06-14" @default.
- W1610939064 modified "2023-10-01" @default.
- W1610939064 title "Significance of kinetic-linkage of oxygen vacancy with SiO 2 /Si interface for SiO 2 -IL scavenging in HfO 2 gate stacks" @default.
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