Matches in SemOpenAlex for { <https://semopenalex.org/work/W1611666088> ?p ?o ?g. }
- W1611666088 endingPage "8861" @default.
- W1611666088 startingPage "8855" @default.
- W1611666088 abstract "The oxidation of room temperature Si(111) by oxygen clusters (O2)n+ (n∼1600) at impact energies of 1.5, 3.0, and 4.5 keV has been examined by x-ray photoelectron spectroscopy. The impact of an oxygen cluster on clean Si(111) at these energies results in the oxidation of an area approximately equal to the cross sectional area of the cluster. Both suboxide and SiO2 are formed. The amount of oxide produced increases with the impact energy. Further exposure of the oxidized surface to the impact of oxygen clusters results primarily in an increase in the amount of SiO2. The number of silicon atoms oxidized per cluster impact on an oxidized surface is substantially less than for clean Si(111) and shows a strong dependence on the impact energy." @default.
- W1611666088 created "2016-06-24" @default.
- W1611666088 creator A5063887646 @default.
- W1611666088 creator A5086055257 @default.
- W1611666088 date "1997-06-01" @default.
- W1611666088 modified "2023-09-27" @default.
- W1611666088 title "Surface reactions driven by cluster impact: Oxidation of Si(111) by (O2)n+ (n∼1600)" @default.
- W1611666088 cites W1568985629 @default.
- W1611666088 cites W1965391329 @default.
- W1611666088 cites W1969864100 @default.
- W1611666088 cites W1977419538 @default.
- W1611666088 cites W1980565892 @default.
- W1611666088 cites W1984744128 @default.
- W1611666088 cites W1984987751 @default.
- W1611666088 cites W1985484954 @default.
- W1611666088 cites W1986285913 @default.
- W1611666088 cites W1987431408 @default.
- W1611666088 cites W1991865143 @default.
- W1611666088 cites W1993282760 @default.
- W1611666088 cites W1996602856 @default.
- W1611666088 cites W1998538077 @default.
- W1611666088 cites W1999129823 @default.
- W1611666088 cites W2001251938 @default.
- W1611666088 cites W2005116376 @default.
- W1611666088 cites W2007412482 @default.
- W1611666088 cites W2008913723 @default.
- W1611666088 cites W2009441526 @default.
- W1611666088 cites W2010684376 @default.
- W1611666088 cites W2010717245 @default.
- W1611666088 cites W2014293004 @default.
- W1611666088 cites W2015539298 @default.
- W1611666088 cites W2017829644 @default.
- W1611666088 cites W2019044833 @default.
- W1611666088 cites W2019189624 @default.
- W1611666088 cites W2020055434 @default.
- W1611666088 cites W2023647052 @default.
- W1611666088 cites W2024401489 @default.
- W1611666088 cites W2027308671 @default.
- W1611666088 cites W2027941560 @default.
- W1611666088 cites W2028090311 @default.
- W1611666088 cites W2032716473 @default.
- W1611666088 cites W2036983976 @default.
- W1611666088 cites W2037429245 @default.
- W1611666088 cites W2043060651 @default.
- W1611666088 cites W2047434603 @default.
- W1611666088 cites W2048127722 @default.
- W1611666088 cites W2048457464 @default.
- W1611666088 cites W2050836775 @default.
- W1611666088 cites W2066537525 @default.
- W1611666088 cites W2067386901 @default.
- W1611666088 cites W2074010380 @default.
- W1611666088 cites W2083526727 @default.
- W1611666088 cites W2086080083 @default.
- W1611666088 cites W2091540161 @default.
- W1611666088 cites W2092228849 @default.
- W1611666088 cites W2094538854 @default.
- W1611666088 cites W2095302351 @default.
- W1611666088 cites W2166462020 @default.
- W1611666088 cites W3000715758 @default.
- W1611666088 cites W4232759318 @default.
- W1611666088 doi "https://doi.org/10.1063/1.473949" @default.
- W1611666088 hasPublicationYear "1997" @default.
- W1611666088 type Work @default.
- W1611666088 sameAs 1611666088 @default.
- W1611666088 citedByCount "13" @default.
- W1611666088 crossrefType "journal-article" @default.
- W1611666088 hasAuthorship W1611666088A5063887646 @default.
- W1611666088 hasAuthorship W1611666088A5086055257 @default.
- W1611666088 hasConcept C107872376 @default.
- W1611666088 hasConcept C113196181 @default.
- W1611666088 hasConcept C121332964 @default.
- W1611666088 hasConcept C164866538 @default.
- W1611666088 hasConcept C175708663 @default.
- W1611666088 hasConcept C178790620 @default.
- W1611666088 hasConcept C184779094 @default.
- W1611666088 hasConcept C185592680 @default.
- W1611666088 hasConcept C199360897 @default.
- W1611666088 hasConcept C2779851234 @default.
- W1611666088 hasConcept C2780634616 @default.
- W1611666088 hasConcept C41008148 @default.
- W1611666088 hasConcept C46141821 @default.
- W1611666088 hasConcept C540031477 @default.
- W1611666088 hasConcept C544956773 @default.
- W1611666088 hasConceptScore W1611666088C107872376 @default.
- W1611666088 hasConceptScore W1611666088C113196181 @default.
- W1611666088 hasConceptScore W1611666088C121332964 @default.
- W1611666088 hasConceptScore W1611666088C164866538 @default.
- W1611666088 hasConceptScore W1611666088C175708663 @default.
- W1611666088 hasConceptScore W1611666088C178790620 @default.
- W1611666088 hasConceptScore W1611666088C184779094 @default.
- W1611666088 hasConceptScore W1611666088C185592680 @default.
- W1611666088 hasConceptScore W1611666088C199360897 @default.
- W1611666088 hasConceptScore W1611666088C2779851234 @default.
- W1611666088 hasConceptScore W1611666088C2780634616 @default.
- W1611666088 hasConceptScore W1611666088C41008148 @default.
- W1611666088 hasConceptScore W1611666088C46141821 @default.
- W1611666088 hasConceptScore W1611666088C540031477 @default.
- W1611666088 hasConceptScore W1611666088C544956773 @default.