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- W1612533570 abstract "Al2O3–TiC ceramics were processed with KrF excimer laser radiation (248 nm). The surface topography of the ablated Al2O3–TiC exhibits many conelike structures with a diameter of 10 µm and a column height of 30 µm. The surface roughness of Al2O3 at the base end surface is smooth, but the surface projection appears at the lateral face. The maximum height of irregularities (Rmax) of Al2O3–TiC is smaller than that of Al2O3 in the case of 0 to 50 pulses are used. However, the Rmax of Al2O3–TiC is higher than that of Al2O3 when over 50 pulses. Energy-dispersive X-ray spectroscopy (EDX) measurement reveals that the ablated conelike surface is composed of a material with high titanium content. EDX results show that the content of Al2O3 in Al2O3–TiC decreases markedly with an increase in fluence." @default.
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- W1612533570 date "2008-02-15" @default.
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- W1612533570 title "KrF Excimer Laser Ablation of Al<sub>2</sub>O<sub>3</sub>and Al<sub>2</sub>O<sub>3</sub>–TiC Ceramics" @default.
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- W1612533570 doi "https://doi.org/10.1143/jjap.47.1068" @default.
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