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- W1613401369 abstract "Thermal flow characteristics of a new type of magnetron sputtering source design have been analyzed for various materials, heat rates and geometries using TOPAZ2D code. Thermal conduction has been assumed to be the only mechanism for transporting heat through the apparatus. Solutions compare well with experiments and demonstrate the usefulness (and cost savings) of performing experimental parameter variations with the model rather than the hardware. Optimal designs based on the present analysis are also discussed." @default.
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- W1613401369 date "1992-08-12" @default.
- W1613401369 modified "2023-09-23" @default.
- W1613401369 title "Thermal analysis of magnetron sputtering designs" @default.
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