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- W161366411 abstract "The mass spectra of dissociation products of silane in RF plasmas during the growth of amorphous silicon films (a-Si:H) are studied in order to examine the effect of the plasma electrons on the composition of the gaseous phase and the growth of a-Si:H films when the residence time of the gas in the discharge zone is unchanged. It is shown that around U/P = 2 V/Pa the rate of growth of a-Si:H films is greatest, while the yield of products from the di- and trisilane groups is higher than for larger U/P." @default.
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- W161366411 date "1987-07-01" @default.
- W161366411 modified "2023-09-23" @default.
- W161366411 title "Mass spectra of silane decomposition products in RF discharge plasmas" @default.
- W161366411 hasPublicationYear "1987" @default.
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