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• W1615067737 abstract "A generic focused ion beam (FIB) system consists of an ion source, a condenser lens, a beam acceptance angle defining aperture, an optional ion species selector, a group of scanning octupoles and axial astigmatism corrector, and an objective lens, which is sometimes absent depending on the desired performance. Ions originating from the source are accelerated to the required energy and focused onto the target. This chapter presents a set of guidelines for the design of an optimized optical column that provides the best and simplest practical approach, under the constraints of the present engineering limitations, to the desired specifications. It discusses the radius of a beam based on its profile and then proceeds to the problem of system optimization after briefly examining the relevance of such an optimization. Several examples are presented to highlight the application of this optimization scheme to the design of FIB systems." @default.
• W1615067737 created "2016-06-24" @default.
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• W1615067737 creator A5071111968 @default.
• W1615067737 date "1991-01-01" @default.
• W1615067737 modified "2023-09-27" @default.
• W1615067737 title "Design Principles of an Optimized Focused Ion Beam System" @default.
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• W1615067737 doi "https://doi.org/10.1016/s0065-2539(08)60865-3" @default.
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