Matches in SemOpenAlex for { <https://semopenalex.org/work/W1616671260> ?p ?o ?g. }
Showing items 1 to 85 of
85
with 100 items per page.
- W1616671260 endingPage "70" @default.
- W1616671260 startingPage "67" @default.
- W1616671260 abstract "The test and characterization of each individual manufactured MEMS structure is of major importance, both from the economic and quality standpoints [1], [2], [3]. A fast, cost-wise and easy to adjust testing system is a step forward on MEMS testing and characterization automation and cost reduction. This paper presents a processor-centric hardware assisted embedded solution to test MEMS structures using the built-in electrostatic actuation mechanisms. The system is based on the Leon soft-core processor, attached with the necessary MEMS specific hardware peripherals (capacitive readout circuit, ADC and DAC) to process the structure response to controlled actuation signals in real-time. The deterministic, parallel behavior of the dedicated hardware peripherals, allied to the simplicity of the sequential programming on a processor results in a well-suited solution to the necessary computational challenges. The system enables measurement of resonant frequency (Fr), quality factor (Q) and pull-in voltage (Vpi) within 1.5 seconds with repeatability better than 5 ppt (parts per thousand)." @default.
- W1616671260 created "2016-06-24" @default.
- W1616671260 creator A5039248965 @default.
- W1616671260 creator A5042599719 @default.
- W1616671260 creator A5054781629 @default.
- W1616671260 creator A5070779338 @default.
- W1616671260 creator A5071900339 @default.
- W1616671260 creator A5072535329 @default.
- W1616671260 date "2015-01-01" @default.
- W1616671260 modified "2023-09-26" @default.
- W1616671260 title "Embedded MEMS Platform for Structure Test and Characterization" @default.
- W1616671260 cites W1998251195 @default.
- W1616671260 cites W2003189438 @default.
- W1616671260 cites W2096814969 @default.
- W1616671260 cites W2122108762 @default.
- W1616671260 doi "https://doi.org/10.1016/j.proeng.2015.08.567" @default.
- W1616671260 hasPublicationYear "2015" @default.
- W1616671260 type Work @default.
- W1616671260 sameAs 1616671260 @default.
- W1616671260 citedByCount "2" @default.
- W1616671260 countsByYear W16166712602016 @default.
- W1616671260 crossrefType "journal-article" @default.
- W1616671260 hasAuthorship W1616671260A5039248965 @default.
- W1616671260 hasAuthorship W1616671260A5042599719 @default.
- W1616671260 hasAuthorship W1616671260A5054781629 @default.
- W1616671260 hasAuthorship W1616671260A5070779338 @default.
- W1616671260 hasAuthorship W1616671260A5071900339 @default.
- W1616671260 hasAuthorship W1616671260A5072535329 @default.
- W1616671260 hasBestOaLocation W16166712601 @default.
- W1616671260 hasConcept C111919701 @default.
- W1616671260 hasConcept C115901376 @default.
- W1616671260 hasConcept C118530786 @default.
- W1616671260 hasConcept C119599485 @default.
- W1616671260 hasConcept C127413603 @default.
- W1616671260 hasConcept C149635348 @default.
- W1616671260 hasConcept C165801399 @default.
- W1616671260 hasConcept C171250308 @default.
- W1616671260 hasConcept C192562407 @default.
- W1616671260 hasConcept C206755178 @default.
- W1616671260 hasConcept C24326235 @default.
- W1616671260 hasConcept C2780841128 @default.
- W1616671260 hasConcept C2780980493 @default.
- W1616671260 hasConcept C37977207 @default.
- W1616671260 hasConcept C41008148 @default.
- W1616671260 hasConcept C42935608 @default.
- W1616671260 hasConcept C78519656 @default.
- W1616671260 hasConcept C9390403 @default.
- W1616671260 hasConceptScore W1616671260C111919701 @default.
- W1616671260 hasConceptScore W1616671260C115901376 @default.
- W1616671260 hasConceptScore W1616671260C118530786 @default.
- W1616671260 hasConceptScore W1616671260C119599485 @default.
- W1616671260 hasConceptScore W1616671260C127413603 @default.
- W1616671260 hasConceptScore W1616671260C149635348 @default.
- W1616671260 hasConceptScore W1616671260C165801399 @default.
- W1616671260 hasConceptScore W1616671260C171250308 @default.
- W1616671260 hasConceptScore W1616671260C192562407 @default.
- W1616671260 hasConceptScore W1616671260C206755178 @default.
- W1616671260 hasConceptScore W1616671260C24326235 @default.
- W1616671260 hasConceptScore W1616671260C2780841128 @default.
- W1616671260 hasConceptScore W1616671260C2780980493 @default.
- W1616671260 hasConceptScore W1616671260C37977207 @default.
- W1616671260 hasConceptScore W1616671260C41008148 @default.
- W1616671260 hasConceptScore W1616671260C42935608 @default.
- W1616671260 hasConceptScore W1616671260C78519656 @default.
- W1616671260 hasConceptScore W1616671260C9390403 @default.
- W1616671260 hasLocation W16166712601 @default.
- W1616671260 hasOpenAccess W1616671260 @default.
- W1616671260 hasPrimaryLocation W16166712601 @default.
- W1616671260 hasRelatedWork W1971688816 @default.
- W1616671260 hasRelatedWork W2021577396 @default.
- W1616671260 hasRelatedWork W2051988743 @default.
- W1616671260 hasRelatedWork W2071036812 @default.
- W1616671260 hasRelatedWork W2109674676 @default.
- W1616671260 hasRelatedWork W2133669813 @default.
- W1616671260 hasRelatedWork W2150562785 @default.
- W1616671260 hasRelatedWork W2340793935 @default.
- W1616671260 hasRelatedWork W2545901417 @default.
- W1616671260 hasRelatedWork W314712 @default.
- W1616671260 hasVolume "120" @default.
- W1616671260 isParatext "false" @default.
- W1616671260 isRetracted "false" @default.
- W1616671260 magId "1616671260" @default.
- W1616671260 workType "article" @default.