Matches in SemOpenAlex for { <https://semopenalex.org/work/W1617009105> ?p ?o ?g. }
- W1617009105 endingPage "3091" @default.
- W1617009105 startingPage "3081" @default.
- W1617009105 abstract "The heteroepitaxial growth of the new ternary, group-IV, semiconductor material, Si1−x−yGexCy on Si(100), has been investigated. The epitaxial quality of Si1−x−yGexCy is found to be inferior to that of Si1−xGex with similar Si/Ge concentration ratio, grown under identical conditions, and the quality deteriorates with increasing C fraction. Also, the surface roughness, as studied by tapping mode atomic force microscopy, increases with increasing C fraction as well as with increasing Ge fraction, suggesting a transition from Frank–van der Merwe to Stranski–Krastanov type growth. We suggest that the very large mismatch between the average bond length in the Si1−x−yGexCy material, as determined by Vegard’s law, and the equilibrium Si–C bond length, weakens the Si–C bonds and reduces the elastic range of the material, thus lowering the barrier for dislocation and stacking fault formation. The change in elasticity may also be responsible for the change in growth morphology, either directly by a lowered barrier for island formation or indirectly through the formation of defects. A decrease in Ge incorporation in the Si1−x−yGexCy films with increasing C incorporation suggests a repulsive Ge–C interaction. Moreover, we observe a C-rich, Ge-deficient precursor phase to SiC precipitates at a growth temperature of 560 °C, whereas at 450 °C no such phase can be observed. The temperature dependence of the precursor formation is consistent with C bulk diffusion. Infrared absorption measurements cannot be used to detect the precursor phase. Finally, the onset of epitaxial breakdown is discussed and an accurate and independent determination of the C fraction and its substitutionality is emphasized." @default.
- W1617009105 created "2016-06-24" @default.
- W1617009105 creator A5004226917 @default.
- W1617009105 creator A5028190540 @default.
- W1617009105 creator A5031358740 @default.
- W1617009105 creator A5048712116 @default.
- W1617009105 creator A5063122052 @default.
- W1617009105 creator A5065754384 @default.
- W1617009105 date "1997-04-01" @default.
- W1617009105 modified "2023-09-24" @default.
- W1617009105 title "Heteroepitaxial properties of Si1−x−yGexCy on Si(100) grown by combined ion- and molecular-beam deposition" @default.
- W1617009105 cites W1498463636 @default.
- W1617009105 cites W1965044047 @default.
- W1617009105 cites W1972346684 @default.
- W1617009105 cites W1975961195 @default.
- W1617009105 cites W1976456819 @default.
- W1617009105 cites W1982910395 @default.
- W1617009105 cites W1987766175 @default.
- W1617009105 cites W2000538180 @default.
- W1617009105 cites W2003389724 @default.
- W1617009105 cites W2004262976 @default.
- W1617009105 cites W2005082475 @default.
- W1617009105 cites W2018461458 @default.
- W1617009105 cites W2024205556 @default.
- W1617009105 cites W2027757441 @default.
- W1617009105 cites W2029607956 @default.
- W1617009105 cites W2035641974 @default.
- W1617009105 cites W2042623839 @default.
- W1617009105 cites W2047138061 @default.
- W1617009105 cites W2047322226 @default.
- W1617009105 cites W2048835789 @default.
- W1617009105 cites W2050685297 @default.
- W1617009105 cites W2054086800 @default.
- W1617009105 cites W2054657383 @default.
- W1617009105 cites W2057120313 @default.
- W1617009105 cites W2058149046 @default.
- W1617009105 cites W2061590962 @default.
- W1617009105 cites W2062042321 @default.
- W1617009105 cites W2063088566 @default.
- W1617009105 cites W2066538605 @default.
- W1617009105 cites W2068776767 @default.
- W1617009105 cites W2072083696 @default.
- W1617009105 cites W2073736960 @default.
- W1617009105 cites W2076219320 @default.
- W1617009105 cites W2078126606 @default.
- W1617009105 cites W2081316147 @default.
- W1617009105 cites W2118007856 @default.
- W1617009105 cites W2172197770 @default.
- W1617009105 cites W2736621048 @default.
- W1617009105 doi "https://doi.org/10.1063/1.364352" @default.
- W1617009105 hasPublicationYear "1997" @default.
- W1617009105 type Work @default.
- W1617009105 sameAs 1617009105 @default.
- W1617009105 citedByCount "14" @default.
- W1617009105 crossrefType "journal-article" @default.
- W1617009105 hasAuthorship W1617009105A5004226917 @default.
- W1617009105 hasAuthorship W1617009105A5028190540 @default.
- W1617009105 hasAuthorship W1617009105A5031358740 @default.
- W1617009105 hasAuthorship W1617009105A5048712116 @default.
- W1617009105 hasAuthorship W1617009105A5063122052 @default.
- W1617009105 hasAuthorship W1617009105A5065754384 @default.
- W1617009105 hasConcept C110738630 @default.
- W1617009105 hasConcept C113196181 @default.
- W1617009105 hasConcept C159122135 @default.
- W1617009105 hasConcept C171250308 @default.
- W1617009105 hasConcept C185592680 @default.
- W1617009105 hasConcept C192562407 @default.
- W1617009105 hasConcept C199360897 @default.
- W1617009105 hasConcept C2778536302 @default.
- W1617009105 hasConcept C2779227376 @default.
- W1617009105 hasConcept C3792809 @default.
- W1617009105 hasConcept C41008148 @default.
- W1617009105 hasConcept C43617362 @default.
- W1617009105 hasConcept C64452783 @default.
- W1617009105 hasConcept C8010536 @default.
- W1617009105 hasConceptScore W1617009105C110738630 @default.
- W1617009105 hasConceptScore W1617009105C113196181 @default.
- W1617009105 hasConceptScore W1617009105C159122135 @default.
- W1617009105 hasConceptScore W1617009105C171250308 @default.
- W1617009105 hasConceptScore W1617009105C185592680 @default.
- W1617009105 hasConceptScore W1617009105C192562407 @default.
- W1617009105 hasConceptScore W1617009105C199360897 @default.
- W1617009105 hasConceptScore W1617009105C2778536302 @default.
- W1617009105 hasConceptScore W1617009105C2779227376 @default.
- W1617009105 hasConceptScore W1617009105C3792809 @default.
- W1617009105 hasConceptScore W1617009105C41008148 @default.
- W1617009105 hasConceptScore W1617009105C43617362 @default.
- W1617009105 hasConceptScore W1617009105C64452783 @default.
- W1617009105 hasConceptScore W1617009105C8010536 @default.
- W1617009105 hasIssue "7" @default.
- W1617009105 hasLocation W16170091051 @default.
- W1617009105 hasOpenAccess W1617009105 @default.
- W1617009105 hasPrimaryLocation W16170091051 @default.
- W1617009105 hasRelatedWork W1975690361 @default.
- W1617009105 hasRelatedWork W1984667993 @default.
- W1617009105 hasRelatedWork W1986568349 @default.
- W1617009105 hasRelatedWork W2014028477 @default.
- W1617009105 hasRelatedWork W2040246326 @default.