FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1620028733> ?p ?o ?g. }

• W1620028733 abstract "“Half-cycle” atomic layer deposition reactions of trimethyl aluminum (TMA) and water on GaAs exposed to wet chemical sulfur treatments are studied for the formation of Al2O3. Trivalent oxides of gallium and arsenic are completely reduced following the first TMA pulse. The same processing step also removes As–S bonding below the level of detection, while the relative concentration of gallium suboxides as well as Ga–S bonds is not affected. A concomitant decrease in the S 2p peak intensity is observed, indicating that sulfur is lost through a volatile reaction product. Further precursor exposures do not measurably affect substrate surface chemistry." @default.
• W1620028733 created "2016-06-24" @default.
• W1620028733 creator A5049480520 @default.
• W1620028733 creator A5057747236 @default.
• W1620028733 creator A5062632101 @default.
• W1620028733 creator A5070561952 @default.
• W1620028733 creator A5073730665 @default.
• W1620028733 creator A5078398095 @default.
• W1620028733 creator A5081690749 @default.
• W1620028733 date "2008-12-22" @default.
• W1620028733 modified "2023-10-01" @default.
• W1620028733 title "Half-cycle atomic layer deposition reaction studies of Al2O3 on (NH4)2S passivated GaAs(100) surfaces" @default.
• W1620028733 cites W1527007735 @default.
• W1620028733 cites W1570618996 @default.
• W1620028733 cites W1627659639 @default.
• W1620028733 cites W1632545279 @default.
• W1620028733 cites W1969141180 @default.
• W1620028733 cites W1971755474 @default.
• W1620028733 cites W1973302453 @default.
• W1620028733 cites W1974396913 @default.
• W1620028733 cites W1976766079 @default.
• W1620028733 cites W1995191254 @default.
• W1620028733 cites W2000520742 @default.
• W1620028733 cites W2010524649 @default.
• W1620028733 cites W2014615647 @default.
• W1620028733 cites W2017852015 @default.
• W1620028733 cites W2019022498 @default.
• W1620028733 cites W2021957598 @default.
• W1620028733 cites W2024946756 @default.
• W1620028733 cites W2039381991 @default.
• W1620028733 cites W2041098777 @default.
• W1620028733 cites W2056737813 @default.
• W1620028733 cites W2061142364 @default.
• W1620028733 cites W2073074066 @default.
• W1620028733 cites W2086148421 @default.
• W1620028733 cites W2086470566 @default.
• W1620028733 cites W2090042839 @default.
• W1620028733 cites W2093196984 @default.
• W1620028733 cites W2154338386 @default.
• W1620028733 doi "https://doi.org/10.1063/1.3054348" @default.
• W1620028733 hasPublicationYear "2008" @default.
• W1620028733 type Work @default.
• W1620028733 sameAs 1620028733 @default.
• W1620028733 citedByCount "97" @default.
• W1620028733 countsByYear W16200287332012 @default.
• W1620028733 countsByYear W16200287332013 @default.
• W1620028733 countsByYear W16200287332014 @default.
• W1620028733 countsByYear W16200287332015 @default.
• W1620028733 countsByYear W16200287332016 @default.
• W1620028733 countsByYear W16200287332017 @default.
• W1620028733 countsByYear W16200287332018 @default.
• W1620028733 countsByYear W16200287332019 @default.
• W1620028733 countsByYear W16200287332020 @default.
• W1620028733 countsByYear W16200287332021 @default.
• W1620028733 countsByYear W16200287332022 @default.
• W1620028733 crossrefType "journal-article" @default.
• W1620028733 hasAuthorship W1620028733A5049480520 @default.
• W1620028733 hasAuthorship W1620028733A5057747236 @default.
• W1620028733 hasAuthorship W1620028733A5062632101 @default.
• W1620028733 hasAuthorship W1620028733A5070561952 @default.
• W1620028733 hasAuthorship W1620028733A5073730665 @default.
• W1620028733 hasAuthorship W1620028733A5078398095 @default.
• W1620028733 hasAuthorship W1620028733A5081690749 @default.
• W1620028733 hasConcept C107872376 @default.
• W1620028733 hasConcept C111368507 @default.
• W1620028733 hasConcept C113196181 @default.
• W1620028733 hasConcept C127313418 @default.
• W1620028733 hasConcept C151730666 @default.
• W1620028733 hasConcept C177801218 @default.
• W1620028733 hasConcept C178790620 @default.
• W1620028733 hasConcept C179104552 @default.
• W1620028733 hasConcept C185592680 @default.
• W1620028733 hasConcept C192562407 @default.
• W1620028733 hasConcept C2777289219 @default.
• W1620028733 hasConcept C2779227376 @default.
• W1620028733 hasConcept C2816523 @default.
• W1620028733 hasConcept C49040817 @default.
• W1620028733 hasConcept C502230775 @default.
• W1620028733 hasConcept C510052550 @default.
• W1620028733 hasConcept C513153333 @default.
• W1620028733 hasConcept C518881349 @default.
• W1620028733 hasConcept C550372918 @default.
• W1620028733 hasConcept C57410435 @default.
• W1620028733 hasConcept C64297162 @default.
• W1620028733 hasConcept C69544855 @default.
• W1620028733 hasConcept C86803240 @default.
• W1620028733 hasConceptScore W1620028733C107872376 @default.
• W1620028733 hasConceptScore W1620028733C111368507 @default.
• W1620028733 hasConceptScore W1620028733C113196181 @default.
• W1620028733 hasConceptScore W1620028733C127313418 @default.
• W1620028733 hasConceptScore W1620028733C151730666 @default.
• W1620028733 hasConceptScore W1620028733C177801218 @default.
• W1620028733 hasConceptScore W1620028733C178790620 @default.
• W1620028733 hasConceptScore W1620028733C179104552 @default.
• W1620028733 hasConceptScore W1620028733C185592680 @default.
• W1620028733 hasConceptScore W1620028733C192562407 @default.
• W1620028733 hasConceptScore W1620028733C2777289219 @default.
• W1620028733 hasConceptScore W1620028733C2779227376 @default.
• W1620028733 hasConceptScore W1620028733C2816523 @default.
• W1620028733 hasConceptScore W1620028733C49040817 @default.

• next