FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1622194599> ?p ?o ?g. }

• W1622194599 abstract "We present a simulation study which examines the use of zone plates for lithography. Zone-Plate-Array Lithography (ZPAL) is a maskless lithography scheme that uses an array of shuttered zone plates to print arbitrary patterns in resist on a substrate. We have demonstrated a working ZPAL system in the UV regime, and are pursuing further experiments with the 4.5 nm X-ray to obtain smaller feature sizes. A general numerical simulation tool, based on the Fresnel-Kirchhoff diffraction theory, has been developed. A pattern will consist of many pixels exposed independently in the resist. Various zone plate and system parameters will affect the intensity distribution at the focal plane. We present simulation results which show the effect of these parameters on both the individual spots and exposed patterns." @default.
• W1622194599 created "2016-06-24" @default.
• W1622194599 creator A5017005305 @default.
• W1622194599 creator A5047618239 @default.
• W1622194599 creator A5059245506 @default.
• W1622194599 creator A5076745909 @default.
• W1622194599 date "2000-01-01" @default.
• W1622194599 modified "2023-09-23" @default.
• W1622194599 title "Zone-Plate-Array Lithography (ZPAL): Simulations for system design" @default.
• W1622194599 cites W1556929613 @default.
• W1622194599 cites W1646594173 @default.
• W1622194599 cites W1658472922 @default.
• W1622194599 cites W1666853924 @default.
• W1622194599 cites W1857327297 @default.
• W1622194599 cites W1987413850 @default.
• W1622194599 cites W2018868337 @default.
• W1622194599 cites W2022994719 @default.
• W1622194599 cites W2027441158 @default.
• W1622194599 cites W2047925175 @default.
• W1622194599 cites W2051497477 @default.
• W1622194599 cites W2070614974 @default.
• W1622194599 cites W2073732659 @default.
• W1622194599 cites W2092257310 @default.
• W1622194599 cites W2095288619 @default.
• W1622194599 cites W2104141858 @default.
• W1622194599 cites W2128201718 @default.
• W1622194599 cites W2167834206 @default.
• W1622194599 cites W2267678191 @default.
• W1622194599 cites W2432517183 @default.
• W1622194599 cites W565317313 @default.
• W1622194599 cites W59018666 @default.
• W1622194599 doi "https://doi.org/10.1063/1.1291225" @default.
• W1622194599 hasPublicationYear "2000" @default.
• W1622194599 type Work @default.
• W1622194599 sameAs 1622194599 @default.
• W1622194599 citedByCount "2" @default.
• W1622194599 crossrefType "proceedings-article" @default.
• W1622194599 hasAuthorship W1622194599A5017005305 @default.
• W1622194599 hasAuthorship W1622194599A5047618239 @default.
• W1622194599 hasAuthorship W1622194599A5059245506 @default.
• W1622194599 hasAuthorship W1622194599A5076745909 @default.
• W1622194599 hasConcept C111368507 @default.
• W1622194599 hasConcept C120665830 @default.
• W1622194599 hasConcept C121332964 @default.
• W1622194599 hasConcept C127313418 @default.
• W1622194599 hasConcept C137905882 @default.
• W1622194599 hasConcept C138885662 @default.
• W1622194599 hasConcept C171250308 @default.
• W1622194599 hasConcept C192562407 @default.
• W1622194599 hasConcept C200274948 @default.
• W1622194599 hasConcept C200292535 @default.
• W1622194599 hasConcept C204223013 @default.
• W1622194599 hasConcept C207114421 @default.
• W1622194599 hasConcept C2776401178 @default.
• W1622194599 hasConcept C2777289219 @default.
• W1622194599 hasConcept C2779227376 @default.
• W1622194599 hasConcept C32623475 @default.
• W1622194599 hasConcept C41794268 @default.
• W1622194599 hasConcept C41895202 @default.
• W1622194599 hasConcept C53524968 @default.
• W1622194599 hasConcept C93038891 @default.
• W1622194599 hasConceptScore W1622194599C111368507 @default.
• W1622194599 hasConceptScore W1622194599C120665830 @default.
• W1622194599 hasConceptScore W1622194599C121332964 @default.
• W1622194599 hasConceptScore W1622194599C127313418 @default.
• W1622194599 hasConceptScore W1622194599C137905882 @default.
• W1622194599 hasConceptScore W1622194599C138885662 @default.
• W1622194599 hasConceptScore W1622194599C171250308 @default.
• W1622194599 hasConceptScore W1622194599C192562407 @default.
• W1622194599 hasConceptScore W1622194599C200274948 @default.
• W1622194599 hasConceptScore W1622194599C200292535 @default.
• W1622194599 hasConceptScore W1622194599C204223013 @default.
• W1622194599 hasConceptScore W1622194599C207114421 @default.
• W1622194599 hasConceptScore W1622194599C2776401178 @default.
• W1622194599 hasConceptScore W1622194599C2777289219 @default.
• W1622194599 hasConceptScore W1622194599C2779227376 @default.
• W1622194599 hasConceptScore W1622194599C32623475 @default.
• W1622194599 hasConceptScore W1622194599C41794268 @default.
• W1622194599 hasConceptScore W1622194599C41895202 @default.
• W1622194599 hasConceptScore W1622194599C53524968 @default.
• W1622194599 hasConceptScore W1622194599C93038891 @default.
• W1622194599 hasLocation W16221945991 @default.
• W1622194599 hasOpenAccess W1622194599 @default.
• W1622194599 hasPrimaryLocation W16221945991 @default.
• W1622194599 hasRelatedWork W1977162844 @default.
• W1622194599 hasRelatedWork W1985666002 @default.
• W1622194599 hasRelatedWork W2004392673 @default.
• W1622194599 hasRelatedWork W2015374096 @default.
• W1622194599 hasRelatedWork W2031299294 @default.
• W1622194599 hasRelatedWork W2031900726 @default.
• W1622194599 hasRelatedWork W2043013470 @default.
• W1622194599 hasRelatedWork W2044288948 @default.
• W1622194599 hasRelatedWork W2047925175 @default.
• W1622194599 hasRelatedWork W2062862264 @default.
• W1622194599 hasRelatedWork W2063484685 @default.
• W1622194599 hasRelatedWork W2074156174 @default.
• W1622194599 hasRelatedWork W2128523187 @default.
• W1622194599 hasRelatedWork W2359129481 @default.
• W1622194599 hasRelatedWork W2363518831 @default.
• W1622194599 hasRelatedWork W2382837621 @default.

• next