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- W1622486714 abstract "Thin films of Ba0.5Sr0.5TiO3 (BST) were deposited on c-plane (0001) sapphire by rf magnetron sputtering and investigated by complementary materials analysis methods. Microwave properties of the films, including tunability and Q factor were measured from 1to20GHz by patterning interdigital capacitors (IDCs) on the film surface. The tunability is correlated with texture, strain, and grain size in the deposited films. An enhanced capacitance tunability of 56% at a bias field of 200kV∕cm and total device Q of more than 15 (up to 20GHz) were achieved following postdeposition annealing at 900°C." @default.
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- W1622486714 date "2006-07-10" @default.
- W1622486714 modified "2023-10-11" @default.
- W1622486714 title "Enhanced tunability of magnetron sputtered Ba0.5Sr0.5TiO3 thin films on c-plane sapphire substrates" @default.
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- W1622486714 doi "https://doi.org/10.1063/1.2220530" @default.
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