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- W1623915785 abstract "The minimal time optimality and the minimal energy optimality are often considered as competing approaches in the trajectory planning for precision movement of the wafer stages in electronic industry. We present here the theoretical and simulation results showing that with appropriate choice of the constraints these approaches are equivalent in the sense that they produce the same trajectory. The optimal control solver DIDO has been used in this research." @default.
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- W1623915785 date "2015-06-01" @default.
- W1623915785 modified "2023-10-16" @default.
- W1623915785 title "On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality" @default.
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- W1623915785 doi "https://doi.org/10.1109/isie.2015.7281450" @default.
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