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- W162433461 abstract "Electrode and adhesion layer were deposited onto quartz crystal blank as electrodes by thermal evaporation method. Quartz crystal resonators was made by using that quartz crystal blanks and then frequency stability was measured with variation of electrode materials and annealing temperatures. Au, Ag, and Al were used as electrode materials and the resonator which has Au electrode had the finest frequency stability. NiCr, Ni, Ti, Al, and Ag were used as adhesion layer between electrode and quartz crystal blanc because the adhesion force between Au and quartz crystal blanc were not strong enough for the electrode. In adhesion test. NiCr had the finest adhesion force, so we used it as adhesion layer in this work. The annealing process from R. T. to 350℃ changed the microstructure of electrode and the diffusion of adhesion layer into electrode was observed. After the annealing at 250℃, the grain growth of electrode material by recrystallization was observed and the observations by auger electron spectroscopy indicated that the adhesion layer diffused info Au electrode during annealing process Acceleration test showed that the diffusion had influenced the frequency shift. The sample which was annealed at 150℃ had the first frequency stability" @default.
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- W162433461 date "1999-01-01" @default.
- W162433461 modified "2023-09-24" @default.
- W162433461 title "Aging Properties of SMD type quartz crystal resonator with variation of electrodes" @default.
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