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• W1624705052 abstract "Positron annihilation spectroscopy (PAS) with beams of controllable energy positrons has shown great promise as a technique for providing information on the concentration and distribution of vacancy-type, open-volume defects following the implantation of silicon. PAS is entirely non-destructive, requires no pre-measurement treatment of the sample and has a range of sensitivity of approximately 1015–1019 defects cm−3. The Surrey Ion Beam Center in collaboration with the University of Bath positron group has been investigating a number of novel applications of PAS such as ion beam dosimetry (including both low energy ion implantation and SIMOX production). Resulting from this work has been the development of a novel wafer-mapping tool compatible with a commercial environment. This paper will discuss applications of a prototype instrument which may make the use of PAS common in the fabrication plant." @default.
• W1624705052 created "2016-06-24" @default.
• W1624705052 creator A5008546913 @default.
• W1624705052 creator A5056677213 @default.
• W1624705052 creator A5058085084 @default.
• W1624705052 creator A5061590852 @default.
• W1624705052 creator A5073158564 @default.
• W1624705052 date "2001-01-01" @default.
• W1624705052 modified "2023-09-27" @default.
• W1624705052 title "Slow positron beams—a versatile tool for studying ion implantation defect related phenomena" @default.
• W1624705052 doi "https://doi.org/10.1063/1.1395414" @default.
• W1624705052 hasPublicationYear "2001" @default.
• W1624705052 type Work @default.
• W1624705052 sameAs 1624705052 @default.
• W1624705052 citedByCount "0" @default.
• W1624705052 crossrefType "proceedings-article" @default.
• W1624705052 hasAuthorship W1624705052A5008546913 @default.
• W1624705052 hasAuthorship W1624705052A5056677213 @default.
• W1624705052 hasAuthorship W1624705052A5058085084 @default.
• W1624705052 hasAuthorship W1624705052A5061590852 @default.
• W1624705052 hasAuthorship W1624705052A5073158564 @default.
• W1624705052 hasConcept C114221277 @default.
• W1624705052 hasConcept C120665830 @default.
• W1624705052 hasConcept C121332964 @default.
• W1624705052 hasConcept C136525101 @default.
• W1624705052 hasConcept C142724271 @default.
• W1624705052 hasConcept C145148216 @default.
• W1624705052 hasConcept C147120987 @default.
• W1624705052 hasConcept C150883371 @default.
• W1624705052 hasConcept C159985019 @default.
• W1624705052 hasConcept C160671074 @default.
• W1624705052 hasConcept C168834538 @default.
• W1624705052 hasConcept C184779094 @default.
• W1624705052 hasConcept C185544564 @default.
• W1624705052 hasConcept C192562407 @default.
• W1624705052 hasConcept C202100949 @default.
• W1624705052 hasConcept C204323151 @default.
• W1624705052 hasConcept C204787440 @default.
• W1624705052 hasConcept C2778711141 @default.
• W1624705052 hasConcept C2985595821 @default.
• W1624705052 hasConcept C32891209 @default.
• W1624705052 hasConcept C41823505 @default.
• W1624705052 hasConcept C46141821 @default.
• W1624705052 hasConcept C49040817 @default.
• W1624705052 hasConcept C50774322 @default.
• W1624705052 hasConcept C544956773 @default.
• W1624705052 hasConcept C62520636 @default.
• W1624705052 hasConcept C71924100 @default.
• W1624705052 hasConceptScore W1624705052C114221277 @default.
• W1624705052 hasConceptScore W1624705052C120665830 @default.
• W1624705052 hasConceptScore W1624705052C121332964 @default.
• W1624705052 hasConceptScore W1624705052C136525101 @default.
• W1624705052 hasConceptScore W1624705052C142724271 @default.
• W1624705052 hasConceptScore W1624705052C145148216 @default.
• W1624705052 hasConceptScore W1624705052C147120987 @default.
• W1624705052 hasConceptScore W1624705052C150883371 @default.
• W1624705052 hasConceptScore W1624705052C159985019 @default.
• W1624705052 hasConceptScore W1624705052C160671074 @default.
• W1624705052 hasConceptScore W1624705052C168834538 @default.
• W1624705052 hasConceptScore W1624705052C184779094 @default.
• W1624705052 hasConceptScore W1624705052C185544564 @default.
• W1624705052 hasConceptScore W1624705052C192562407 @default.
• W1624705052 hasConceptScore W1624705052C202100949 @default.
• W1624705052 hasConceptScore W1624705052C204323151 @default.
• W1624705052 hasConceptScore W1624705052C204787440 @default.
• W1624705052 hasConceptScore W1624705052C2778711141 @default.
• W1624705052 hasConceptScore W1624705052C2985595821 @default.
• W1624705052 hasConceptScore W1624705052C32891209 @default.
• W1624705052 hasConceptScore W1624705052C41823505 @default.
• W1624705052 hasConceptScore W1624705052C46141821 @default.
• W1624705052 hasConceptScore W1624705052C49040817 @default.
• W1624705052 hasConceptScore W1624705052C50774322 @default.
• W1624705052 hasConceptScore W1624705052C544956773 @default.
• W1624705052 hasConceptScore W1624705052C62520636 @default.
• W1624705052 hasConceptScore W1624705052C71924100 @default.
• W1624705052 hasLocation W16247050521 @default.
• W1624705052 hasOpenAccess W1624705052 @default.
• W1624705052 hasPrimaryLocation W16247050521 @default.
• W1624705052 hasRelatedWork W115998318 @default.
• W1624705052 hasRelatedWork W1595974260 @default.
• W1624705052 hasRelatedWork W1934838252 @default.
• W1624705052 hasRelatedWork W1979928830 @default.
• W1624705052 hasRelatedWork W1996210805 @default.
• W1624705052 hasRelatedWork W2032998672 @default.
• W1624705052 hasRelatedWork W2044696519 @default.
• W1624705052 hasRelatedWork W2080606091 @default.
• W1624705052 hasRelatedWork W2141543680 @default.
• W1624705052 hasRelatedWork W2160428151 @default.
• W1624705052 hasRelatedWork W2167420376 @default.
• W1624705052 hasRelatedWork W2258490542 @default.
• W1624705052 hasRelatedWork W2326715713 @default.
• W1624705052 hasRelatedWork W2334901782 @default.
• W1624705052 hasRelatedWork W2491097188 @default.
• W1624705052 hasRelatedWork W281742874 @default.
• W1624705052 hasRelatedWork W2996936000 @default.
• W1624705052 hasRelatedWork W3197731550 @default.
• W1624705052 hasRelatedWork W3210917060 @default.
• W1624705052 hasRelatedWork W79053772 @default.
• W1624705052 isParatext "false" @default.
• W1624705052 isRetracted "false" @default.

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