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- W1625600922 abstract "We present for the first time epitaxially grown Si:C nMOSFET channels acting as boron blocking barriers containing up to 1.4% substitutional carbon. The high impact of interstitial carbon and epitaxial growth conditions on electron inversion layer mobility is evidenced for the first time. We achieved super-retrograde channel and pockets profiles for improved short channel effects control. This allows improved I/sub ON/(850 /spl mu/A//spl mu/m)/I/sub OFF/(200 nA//spl mu/m) ratio as compared to non-carbonated short channel devices without any degradation of transport properties or gate oxide integrity." @default.
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- W1625600922 date "2004-03-02" @default.
- W1625600922 modified "2023-10-07" @default.
- W1625600922 title "A new Si:C epitaxial channel nMOSFET architecture with improved drivability and short-channel characteristics" @default.
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- W1625600922 doi "https://doi.org/10.1109/vlsit.2003.1221081" @default.
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