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• W1627334709 abstract "A ZrO2∕TiO2∕Si gate stack has been prepared by using solid phase reaction between sputtered ZrO2∕Ti stack and underlying SiO2∕Si substrate through in situ vacuum annealing. X-ray photoelectron spectroscopy was used to analyze interfacial properties of the ZrO2∕TiO2∕Si stack after annealing at high temperatures. The interfacial silicate is composed of Ti silicate and ZrO2 layer does not take part in the interfacial reaction to form Zr silicate. Such a stack has the advantage of combining high dielectric constant of ZrO2 and excellent interfacial property of Ti silicate/Si interface, and will have potential applications in the advanced metal-oxide-semiconductor devices." @default.
• W1627334709 created "2016-06-24" @default.
• W1627334709 creator A5051762373 @default.
• W1627334709 creator A5067289998 @default.
• W1627334709 creator A5074609528 @default.
• W1627334709 date "2007-10-22" @default.
• W1627334709 modified "2023-09-26" @default.
• W1627334709 title "X-ray photoelectron spectroscopy study of ZrO2∕TiO2∕Si stack" @default.
• W1627334709 cites W1516391717 @default.
• W1627334709 cites W1665148940 @default.
• W1627334709 cites W1967141266 @default.
• W1627334709 cites W1991965248 @default.
• W1627334709 cites W1995691998 @default.
• W1627334709 cites W1997186445 @default.
• W1627334709 cites W1998991681 @default.
• W1627334709 cites W2003645630 @default.
• W1627334709 cites W2014137989 @default.
• W1627334709 cites W2023320944 @default.
• W1627334709 cites W2035055486 @default.
• W1627334709 cites W2037550537 @default.
• W1627334709 cites W2045187879 @default.
• W1627334709 cites W2055356494 @default.
• W1627334709 cites W2055699318 @default.
• W1627334709 cites W2081096093 @default.
• W1627334709 cites W2090178022 @default.
• W1627334709 cites W2101048126 @default.
• W1627334709 cites W2101781928 @default.
• W1627334709 cites W2161087786 @default.
• W1627334709 cites W2165680720 @default.
• W1627334709 cites W2166896191 @default.
• W1627334709 doi "https://doi.org/10.1063/1.2795331" @default.
• W1627334709 hasPublicationYear "2007" @default.
• W1627334709 type Work @default.
• W1627334709 sameAs 1627334709 @default.
• W1627334709 citedByCount "10" @default.
• W1627334709 countsByYear W16273347092012 @default.
• W1627334709 countsByYear W16273347092013 @default.
• W1627334709 countsByYear W16273347092014 @default.
• W1627334709 countsByYear W16273347092017 @default.
• W1627334709 countsByYear W16273347092021 @default.
• W1627334709 crossrefType "journal-article" @default.
• W1627334709 hasAuthorship W1627334709A5051762373 @default.
• W1627334709 hasAuthorship W1627334709A5067289998 @default.
• W1627334709 hasAuthorship W1627334709A5074609528 @default.
• W1627334709 hasConcept C111368507 @default.
• W1627334709 hasConcept C113196181 @default.
• W1627334709 hasConcept C127313418 @default.
• W1627334709 hasConcept C127413603 @default.
• W1627334709 hasConcept C133386390 @default.
• W1627334709 hasConcept C175708663 @default.
• W1627334709 hasConcept C185592680 @default.
• W1627334709 hasConcept C191897082 @default.
• W1627334709 hasConcept C192562407 @default.
• W1627334709 hasConcept C199360897 @default.
• W1627334709 hasConcept C2777289219 @default.
• W1627334709 hasConcept C2777335606 @default.
• W1627334709 hasConcept C2777855556 @default.
• W1627334709 hasConcept C2779851234 @default.
• W1627334709 hasConcept C41008148 @default.
• W1627334709 hasConcept C42360764 @default.
• W1627334709 hasConcept C43617362 @default.
• W1627334709 hasConcept C49040817 @default.
• W1627334709 hasConcept C544956773 @default.
• W1627334709 hasConcept C9395851 @default.
• W1627334709 hasConceptScore W1627334709C111368507 @default.
• W1627334709 hasConceptScore W1627334709C113196181 @default.
• W1627334709 hasConceptScore W1627334709C127313418 @default.
• W1627334709 hasConceptScore W1627334709C127413603 @default.
• W1627334709 hasConceptScore W1627334709C133386390 @default.
• W1627334709 hasConceptScore W1627334709C175708663 @default.
• W1627334709 hasConceptScore W1627334709C185592680 @default.
• W1627334709 hasConceptScore W1627334709C191897082 @default.
• W1627334709 hasConceptScore W1627334709C192562407 @default.
• W1627334709 hasConceptScore W1627334709C199360897 @default.
• W1627334709 hasConceptScore W1627334709C2777289219 @default.
• W1627334709 hasConceptScore W1627334709C2777335606 @default.
• W1627334709 hasConceptScore W1627334709C2777855556 @default.
• W1627334709 hasConceptScore W1627334709C2779851234 @default.
• W1627334709 hasConceptScore W1627334709C41008148 @default.
• W1627334709 hasConceptScore W1627334709C42360764 @default.
• W1627334709 hasConceptScore W1627334709C43617362 @default.
• W1627334709 hasConceptScore W1627334709C49040817 @default.
• W1627334709 hasConceptScore W1627334709C544956773 @default.
• W1627334709 hasConceptScore W1627334709C9395851 @default.
• W1627334709 hasIssue "17" @default.
• W1627334709 hasLocation W16273347091 @default.
• W1627334709 hasOpenAccess W1627334709 @default.
• W1627334709 hasPrimaryLocation W16273347091 @default.
• W1627334709 hasRelatedWork W1535647204 @default.
• W1627334709 hasRelatedWork W1982933493 @default.
• W1627334709 hasRelatedWork W1994935154 @default.
• W1627334709 hasRelatedWork W2007429407 @default.
• W1627334709 hasRelatedWork W2028655826 @default.
• W1627334709 hasRelatedWork W2043802624 @default.
• W1627334709 hasRelatedWork W2059023455 @default.
• W1627334709 hasRelatedWork W2061921057 @default.
• W1627334709 hasRelatedWork W2081695234 @default.
• W1627334709 hasRelatedWork W2597213210 @default.
• W1627334709 hasVolume "91" @default.
• W1627334709 isParatext "false" @default.

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