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• W1627776184 endingPage "5483" @default.
• W1627776184 startingPage "5478" @default.
• W1627776184 abstract "This paper focuses on the growth of HfO2 by atomic layer deposition (ALD) at 350°C on pseudomorphic Si1−xGex thin films (x=15% and 25%). Two different Si1−xGex surface preparations (chemical oxidation and HF “last” treatment) have been investigated to obtain the highest HfO2 film quality with the thinnest interfacial layer possible. The initial stages of the ALD growth on these different surfaces (i.e., hafnium adsorption and chlorine contamination) analyzed by total x-ray fluorescence show that HF last treated Si1−xGex surfaces are more convenient than chemically oxidized ones to grow high quality HfO2 layers. This result is confirmed by x-ray photoelectron spectroscopy investigations of the interfacial layer structure as a function of the surface treatment. As-deposited and annealed thin HfO2 layers (2.5, 3.5, 5, and 8nm) grown on HF last treated Si0.75Ge0.25 strained layers were analyzed by mercury probe. An equivalent oxide thickness as low as 0.7nm was obtained for a 2.5nm as-deposited HfO2 film. Mobility results show that a 22% mobility enhancement is obtained in the entire effective field range with HfO2∕SiGe compared to the HfO2∕Si reference." @default.
• W1627776184 created "2016-06-24" @default.
• W1627776184 creator A5013032665 @default.
• W1627776184 creator A5028774619 @default.
• W1627776184 creator A5030392042 @default.
• W1627776184 creator A5066407622 @default.
• W1627776184 creator A5070589905 @default.
• W1627776184 creator A5077245319 @default.
• W1627776184 creator A5077253206 @default.
• W1627776184 date "2004-11-05" @default.
• W1627776184 modified "2023-10-16" @default.
• W1627776184 title "Study of HfO2 films deposited on strained Si1−xGex layers by atomic layer deposition" @default.
• W1627776184 cites W1526661915 @default.
• W1627776184 cites W1969532431 @default.
• W1627776184 cites W1970200102 @default.
• W1627776184 cites W1976762601 @default.
• W1627776184 cites W1981024873 @default.
• W1627776184 cites W1984298226 @default.
• W1627776184 cites W2006553171 @default.
• W1627776184 cites W2015763048 @default.
• W1627776184 cites W2028186930 @default.
• W1627776184 cites W2038869843 @default.
• W1627776184 cites W2042405054 @default.
• W1627776184 cites W2046164621 @default.
• W1627776184 cites W2054462966 @default.
• W1627776184 cites W2061476898 @default.
• W1627776184 cites W2067859946 @default.
• W1627776184 cites W2075828677 @default.
• W1627776184 cites W2078722583 @default.
• W1627776184 cites W2080012384 @default.
• W1627776184 cites W2089146636 @default.
• W1627776184 cites W2089653545 @default.
• W1627776184 cites W2092400004 @default.
• W1627776184 cites W2105990677 @default.
• W1627776184 cites W2127840831 @default.
• W1627776184 cites W2273886880 @default.
• W1627776184 doi "https://doi.org/10.1063/1.1805184" @default.
• W1627776184 hasPublicationYear "2004" @default.
• W1627776184 type Work @default.
• W1627776184 sameAs 1627776184 @default.
• W1627776184 citedByCount "20" @default.
• W1627776184 countsByYear W16277761842013 @default.
• W1627776184 countsByYear W16277761842017 @default.
• W1627776184 countsByYear W16277761842023 @default.
• W1627776184 crossrefType "journal-article" @default.
• W1627776184 hasAuthorship W1627776184A5013032665 @default.
• W1627776184 hasAuthorship W1627776184A5028774619 @default.
• W1627776184 hasAuthorship W1627776184A5030392042 @default.
• W1627776184 hasAuthorship W1627776184A5066407622 @default.
• W1627776184 hasAuthorship W1627776184A5070589905 @default.
• W1627776184 hasAuthorship W1627776184A5077245319 @default.
• W1627776184 hasAuthorship W1627776184A5077253206 @default.
• W1627776184 hasConcept C113196181 @default.
• W1627776184 hasConcept C127413603 @default.
• W1627776184 hasConcept C151730666 @default.
• W1627776184 hasConcept C171250308 @default.
• W1627776184 hasConcept C175708663 @default.
• W1627776184 hasConcept C185592680 @default.
• W1627776184 hasConcept C19067145 @default.
• W1627776184 hasConcept C191897082 @default.
• W1627776184 hasConcept C192562407 @default.
• W1627776184 hasConcept C2777855556 @default.
• W1627776184 hasConcept C2779227376 @default.
• W1627776184 hasConcept C2816523 @default.
• W1627776184 hasConcept C42360764 @default.
• W1627776184 hasConcept C43617362 @default.
• W1627776184 hasConcept C534791751 @default.
• W1627776184 hasConcept C546638069 @default.
• W1627776184 hasConcept C64297162 @default.
• W1627776184 hasConcept C69544855 @default.
• W1627776184 hasConcept C86803240 @default.
• W1627776184 hasConceptScore W1627776184C113196181 @default.
• W1627776184 hasConceptScore W1627776184C127413603 @default.
• W1627776184 hasConceptScore W1627776184C151730666 @default.
• W1627776184 hasConceptScore W1627776184C171250308 @default.
• W1627776184 hasConceptScore W1627776184C175708663 @default.
• W1627776184 hasConceptScore W1627776184C185592680 @default.
• W1627776184 hasConceptScore W1627776184C19067145 @default.
• W1627776184 hasConceptScore W1627776184C191897082 @default.
• W1627776184 hasConceptScore W1627776184C192562407 @default.
• W1627776184 hasConceptScore W1627776184C2777855556 @default.
• W1627776184 hasConceptScore W1627776184C2779227376 @default.
• W1627776184 hasConceptScore W1627776184C2816523 @default.
• W1627776184 hasConceptScore W1627776184C42360764 @default.
• W1627776184 hasConceptScore W1627776184C43617362 @default.
• W1627776184 hasConceptScore W1627776184C534791751 @default.
• W1627776184 hasConceptScore W1627776184C546638069 @default.
• W1627776184 hasConceptScore W1627776184C64297162 @default.
• W1627776184 hasConceptScore W1627776184C69544855 @default.
• W1627776184 hasConceptScore W1627776184C86803240 @default.
• W1627776184 hasIssue "10" @default.
• W1627776184 hasLocation W16277761841 @default.
• W1627776184 hasOpenAccess W1627776184 @default.
• W1627776184 hasPrimaryLocation W16277761841 @default.
• W1627776184 hasRelatedWork W1982933493 @default.
• W1627776184 hasRelatedWork W1984299106 @default.
• W1627776184 hasRelatedWork W1985064754 @default.
• W1627776184 hasRelatedWork W2042617377 @default.

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